[1] PAVESI L, LOCKWOOD D J. Silicon Photonics［M］. Berlin: Springer, 2004.

[2] OSSICINI S, PAVESI L, PRIOLO F. Light emitting silicon for microphotonics［M］. Springer, Berlin, 2003.

[3] HAN H S, SEO S Y, SHIN J H. Optical gain at 1.54 μm in erbium-doped silicon nanocluster sensitized waveguide［J］. Appl Phys Lett, 2001, 79: 4568-4570.

[4] WANG X J, NAKAJIMA T, ISSHIKI H et al. Fabrication and characterization of Er silicates on SiO2/Si substrates［J］. Appl Phys Lett, 2009, 95: 041906-1-3.

[5] SAVIO R L, MIRITELLO M, PIRO A M et al. The influence of stoichiometry on the structural stability and on the optical emission of erbium silicate thin films［J］. Appl Phys Lett, 2008, 93: 021919-1-3.

[6] YIN Y, SUN K, XU W J et al. 1.53 μm photo-and electroluminescence from Er3+ in erbium silicate［J］. J Phys: Condens Matter, 2009, 21: 012204-012207.

[7] SAINI S, CHEN K, DUAN X M et al. Er2O3 for high-gain waveguide amplifiers［J］. J Electron Mater, 2004, 33: 80-84.

[8] MIRITELLO M, SAVIO R, PIRO A M et al. Optical and structural properties of Er2O3 films grown by magnetron sputtering［J］ J Appl Phys, 2006, 100: 013502-013507.

[9] MIRITELLO M, LO SAVIO R, IACONA F et al. The influence of substrate on the properties of Er2O3 films grown by magnetron sputtering［J］. J Lum, 2006, 121: 233-237.

[10] AGARWAL V, SEHRAWAT K, MATHUR P C et al. Analysis of the shape of PL spectra and its temperature dependence in self-supporting porous silicon［J］. Phys Stat Sol, 2000, 182: 385-388.

[11] KANJILAL A, REBOHLE L, SKORUPA W, et al. Correlation between the microstructure and electroluminescence properties of Er-doped metal-oxide semiconductor structures［J］. Appl Phys Lett, 2009, 94: 101916-1-3.