• Piezoelectrics & Acoustooptics
  • Vol. 42, Issue 1, 67 (2020)
LENG Junlin, DONG Jiahe, LU Chuan, CHEN Yunxiang..., LI Hualin, CHEN Shangquan, PENG Xiao, KOU Jun, TANG Yonghong and MI Jia|Show fewer author(s)
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    DOI: 10-11977/j.issn.1004-2474.2020-01-016 Cite this Article
    LENG Junlin, DONG Jiahe, LU Chuan, CHEN Yunxiang, LI Hualin, CHEN Shangquan, PENG Xiao, KOU Jun, TANG Yonghong, MI Jia. A Narrowband Temperature Compensated SAW Filter[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 67 Copy Citation Text show less

    Abstract

    A narrowband temperature compensated SAW (TC-SAW) filter with near zero temperature coefficient of frequency (TCF) is developed in this work. The blackened 42° Y-X LiTaO3 wafer was adopted as the substrate and SiO2 film was used as the temperature compensated layer. A flattened SiO2 thin film was obtained by CMP method. A TC-SAW filter prototype was fabricated and tested. The tested results showed that the TC-SAW filter had a center frequency of 1 360 MHz and only 390 kHz frequency drift with temperature in the range of -55 ℃ to 85 ℃, the temperature coefficient of frequency(TCF) was about -2×10-6/℃ and insertion loss was about 1.3 dB.
    LENG Junlin, DONG Jiahe, LU Chuan, CHEN Yunxiang, LI Hualin, CHEN Shangquan, PENG Xiao, KOU Jun, TANG Yonghong, MI Jia. A Narrowband Temperature Compensated SAW Filter[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 67
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