Chenyang ZHANG, Defeng MO, Hongyan XU, Yingjie MA, Yi GU, Xue LI, Wenxian SU. Design and characterization of microlens arrays for InGaAs single photon detectors[J]. Optics and Precision Engineering, 2024, 32(11): 1667

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- Optics and Precision Engineering
- Vol. 32, Issue 11, 1667 (2024)

Fig. 1. Design process of microlens structure parameters

Fig. 2. Microlens structure

Fig. 3. Schematic diagram of duty cycle of square aperture microlens

Fig. 4. Simulation image of single unit microlens

Fig. 5. Relationship curves between curvature, thickness and Airy spot radius of two types of microlens arrays

Fig. 6. Simulated image of GaP microlens

Fig. 7. Simulated image of Si microlens

Fig. 8. Morphology of two microlenses

Fig. 9. 3D imaging of two microlenses

Fig. 10. Schematic diagram of focal length measurement

Fig. 11. Result of microlens focal length test
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Table 1. Focal plane parameters
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Table 2. Comparison of refractive index and transmittance of commonly used microlens materials
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Table 3. Structural parameters of two microlens designs
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Table 4. Simulation results of two microlenses
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Table 5. Parameters of two microlens morphology

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