• Optics and Precision Engineering
  • Vol. 32, Issue 11, 1667 (2024)
Chenyang ZHANG1,2, Defeng MO2, Hongyan XU2, Yingjie MA2..., Yi GU2, Xue LI2 and Wenxian SU1,*|Show fewer author(s)
Author Affiliations
  • 1School of Energy and Power Engineering, University of Shanghai for Science and Technology, Shanghai200093, China
  • 2National Key Laboratory of Infrared Detection, Shanghai Institute of Technical Physics of the Chinese Academy of Sciences, Shanghai00083, China
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    DOI: 10.37188/OPE.20243211.1667 Cite this Article
    Chenyang ZHANG, Defeng MO, Hongyan XU, Yingjie MA, Yi GU, Xue LI, Wenxian SU. Design and characterization of microlens arrays for InGaAs single photon detectors[J]. Optics and Precision Engineering, 2024, 32(11): 1667 Copy Citation Text show less
    Design process of microlens structure parameters
    Fig. 1. Design process of microlens structure parameters
    Microlens structure
    Fig. 2. Microlens structure
    Schematic diagram of duty cycle of square aperture microlens
    Fig. 3. Schematic diagram of duty cycle of square aperture microlens
    Simulation image of single unit microlens
    Fig. 4. Simulation image of single unit microlens
    Relationship curves between curvature, thickness and Airy spot radius of two types of microlens arrays
    Fig. 5. Relationship curves between curvature, thickness and Airy spot radius of two types of microlens arrays
    Simulated image of GaP microlens
    Fig. 6. Simulated image of GaP microlens
    Simulated image of Si microlens
    Fig. 7. Simulated image of Si microlens
    Morphology of two microlenses
    Fig. 8. Morphology of two microlenses
    3D imaging of two microlenses
    Fig. 9. 3D imaging of two microlenses
    Schematic diagram of focal length measurement
    Fig. 10. Schematic diagram of focal length measurement
    Result of microlens focal length test
    Fig. 11. Result of microlens focal length test
    参 数InGaAs APD-1InGaAs APD-2
    焦平面材料InPInP
    响应波长1.064 μm1.064 μm
    衬底厚度260 μm260 μm
    光敏区尺寸Φ10 μm25 μm×25 μm
    光敏区间隔50 μm100 μm
    Table 1. Focal plane parameters
    材料折射率透过率
    GaP3.173 21
    Si3.554 80.783 58
    InP3.257 41.758 0×10-8
    Al2O31.616 51
    Table 2. Comparison of refractive index and transmittance of commonly used microlens materials
    材料冠高/μm孔径/μm曲率/μm折射率厚度/μm
    GaP0.7045.003623.17290
    Si3.0095.003783.55250
    Table 3. Structural parameters of two microlens designs
    材 料RMS半径/μm艾里斑半径/μm能量集中度/%
    2.5°
    GaP0.3210.3290.3544.95183.71
    Si0.1690.1770.2012.01597.21
    Table 4. Simulation results of two microlenses
    材料冠高孔径曲率厚度理想焦距测试焦距
    GaP0.69145.03367240334315
    Si3.0096.65391293362352
    Table 5. Parameters of two microlens morphology
    Chenyang ZHANG, Defeng MO, Hongyan XU, Yingjie MA, Yi GU, Xue LI, Wenxian SU. Design and characterization of microlens arrays for InGaAs single photon detectors[J]. Optics and Precision Engineering, 2024, 32(11): 1667
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