• Chinese Journal of Lasers
  • Vol. 47, Issue 3, 301006 (2020)
Zhang Hanyu1、2, Cui Yun2、3, Sun Yong2、3、4, Zhang Yibin2、3, Wang Yonglu2、3, Zhou Qinling3, and Shao Jianda1、2、3
Author Affiliations
  • 1School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 2Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai 201800, China
  • 3Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China
  • 4Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences,Beijing 100049, China
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    DOI: 10.3788/CJL202047.0301006 Cite this Article Set citation alerts
    Zhang Hanyu, Cui Yun, Sun Yong, Zhang Yibin, Wang Yonglu, Zhou Qinling, Shao Jianda. Fabrication of Environmentally Adaptive Mid-Infrared Broadband Antireflection Components[J]. Chinese Journal of Lasers, 2020, 47(3): 301006 Copy Citation Text show less

    Abstract

    Infrared broadband antireflection components were successfully fabricated using a microstructure approach combined with a coating method. First, the influence of period, filling factor, height, and film thickness on the required band transmittance was simulated using FDTD Solutions software. As such, the microstructure and film parameters corresponding to good antireflection were obtained. Then, according to these parameters, a parabolic cone microstructure was prepared onto the surface of a sapphire through laser interference lithography combined with reactive ion etching technology. Finally, a SiO2 film layer was coated onto the surface of the microstructure. Test results show that the average transmittance of samples with single-sided microstructure and composite structure at 1.5--4 μm were 92.3% and 98.7%, respectively. Therefore, the transmittance increased by 11.0% compared with double-sided polished sapphire samples. Infrared broadband antireflection of the sapphire was obtained. Finally, a high-and-low temperature cycle and humidity experiment was conducted on sapphire element with composite structure. This experiment shows that the change in transmittance was not obvious and without obvious water absorption, indicating that the component has environmental durability.
    Zhang Hanyu, Cui Yun, Sun Yong, Zhang Yibin, Wang Yonglu, Zhou Qinling, Shao Jianda. Fabrication of Environmentally Adaptive Mid-Infrared Broadband Antireflection Components[J]. Chinese Journal of Lasers, 2020, 47(3): 301006
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