Design, Fabrication and Self-focusing Properties of Varied Line-space Grating

JIN Fei-fei; LIU Shi-bing; ZHU Xiao-li; XIE Chang-qing; LIU Ming

doi:10.3969/j.issn.1003-501x.2009.11.011

Journals >Opto-Electronic Engineering >Volume 36 >Issue 11 >Page 48 > Article

Opto-Electronic Engineering
Vol. 36, Issue 11, 48 (2009)

Design, Fabrication and Self-focusing Properties of Varied Line-space Grating

JIN Fei-fei^1、2、*, LIU Shi-bing¹, ZHU Xiao-li², XIE Chang-qing², and LIU Ming²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2009.11.011 Cite this Article

JIN Fei-fei, LIU Shi-bing, ZHU Xiao-li, XIE Chang-qing, LIU Ming. Design, Fabrication and Self-focusing Properties of Varied Line-space Grating[J]. Opto-Electronic Engineering, 2009, 36(11): 48 Copy Citation Text

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Abstract

The self-focusing properties, design, fabrication and diffraction properties of Varied Line-Space (VLS) grating were investigated in detail. The VLS grating was automatically optimized and generated by the macro program. The 300 l/mm transmission VLS grating operating at 355 nm was fabricated by e-beam lithography. The diffraction properties of VLS grating were characterized with focusing-spot testing system. The diffraction peaks of fabricated VLS grating were measured with a frequency tripled Nd:YAG laser. Moreover, the experimental results were compared with those using He-Ne laser. It has been indicated that the VLS grating of active design has promising ability to significantly improve the diffraction intensity and spectrum resolution.

Keywords

diffraction optics self-focusing property varied line-space grating

JIN Fei-fei, LIU Shi-bing, ZHU Xiao-li, XIE Chang-qing, LIU Ming. Design, Fabrication and Self-focusing Properties of Varied Line-space Grating[J]. Opto-Electronic Engineering, 2009, 36(11): 48

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