Yi Tian, Guoqi Bao, Kai Liu. Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry[J]. Chinese Journal of Lasers, 2019, 46(5): 0504003
- Chinese Journal of Lasers
- Vol. 46, Issue 5, 0504003 (2019)
Fig. 1. Relationship between amplitude and frequency at 320th column. (a) Average intensity A c; (b) intensity modulation B c
Fig. 2. Fitting curves of intensity modulation ratioversus frequency
Fig. 3. Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) proposed method
Fig. 4. Scanning target. (a) Reference plane; (b) plane with black letters
Fig. 5. Fitting curves of intensity modulation ratio versus frequency
Fig. 6. Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) method in Ref. [14]; (c) method in Ref. [15]; (d) proposed method
Fig. 7. Comparison of phase errors at 320th column
Fig. 8. Reconstruction results of stripe pillow. (a) Conventional PMP method; (b) proposed method
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Table 1. Root-mean-square error of phase of different methods10-4 rad
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