• Chinese Journal of Lasers
  • Vol. 26, Issue 9, 808 (1999)
[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. C/Al Soft X-ray Multilayer Mirrors[J]. Chinese Journal of Lasers, 1999, 26(9): 808 Copy Citation Text show less

    Abstract

    A new material combination, C/Al, for normal-incidence multilayer mirrors at the wavelength λ=28.5 nm is reported. Compared with Mo/Si, and C/Si multilayers, the C/Al mirrors have the lower second-order peak at the 15.0 nm. The C/Al soft X-ray multilayer, fabricated by magnetron sputtering, was characterized by grazing-incidence X-ray diffraction.