• Journal of Applied Optics
  • Vol. 44, Issue 4, 816 (2023)
Lun XING1,2, Mei SANG1,2,*, Zhenman SHI1,2, Shuang WANG1,2, and Tiegen LIU1,2
Author Affiliations
  • 1School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronics Information Technology (Ministry of Education), Tianjin 300072, China
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    DOI: 10.5768/JAO202344.0403002 Cite this Article
    Lun XING, Mei SANG, Zhenman SHI, Shuang WANG, Tiegen LIU. White-light interference demodulation algorithm based on SVMD-HD denoising[J]. Journal of Applied Optics, 2023, 44(4): 816 Copy Citation Text show less
    Flow chart of SVMD-HD filtering algorithm
    Fig. 1. Flow chart of SVMD-HD filtering algorithm
    Physical image of experimental setup
    Fig. 2. Physical image of experimental setup
    White light interference signal diagram.
    Fig. 3. White light interference signal diagram.
    IMFs obtained by SVMD
    Fig. 4. IMFs obtained by SVMD
    Hausdorff distance between each modal component and original signal as well as threshold
    Fig. 5. Hausdorff distance between each modal component and original signal as well as threshold
    Results of signal filtering in Fig.4 ( b ) by using SVMD-HD
    Fig. 6. Results of signal filtering in Fig.4 ( b ) by using SVMD-HD
    Surface measuring results with step height of 10 μm by traditional algorithm
    Fig. 7. Surface measuring results with step height of 10 μm by traditional algorithm
    Surface measurement results of standard steps with height of 10 μm
    Fig. 8. Surface measurement results of standard steps with height of 10 μm
    Measurement results of step devices with heights of 500 nm and 1 200 nm
    Fig. 9. Measurement results of step devices with heights of 500 nm and 1 200 nm
    CCDPI位移台压电控制器干涉物镜
    E3ISPM20000KPAP-725.CLE-709Nikon CF PLAN 20×
    Table 1. Model of main device used in experimental setup
    算法平均高度/μm绝对误差/μm单个像素点计算时间/s
    白光相移算法9.3820.2770.109
    基于impCEEMDAN的间隙匹配算法9.1200.0152.239
    所提算法9.1150.0100.514
    Table 2. Comparison of measurement results with different algorithms
    测量次数高度/μm测量次数高度/μm
    19.12369.108
    29.08979.116
    39.11289.123
    49.12299.120
    59.118109.117
    平均值/μm9.115标准差/μm0.010
    Table 3. Repeated measurement results of proposed algorithm
    Lun XING, Mei SANG, Zhenman SHI, Shuang WANG, Tiegen LIU. White-light interference demodulation algorithm based on SVMD-HD denoising[J]. Journal of Applied Optics, 2023, 44(4): 816
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