Lun XING, Mei SANG, Zhenman SHI, Shuang WANG, Tiegen LIU. White-light interference demodulation algorithm based on SVMD-HD denoising[J]. Journal of Applied Optics, 2023, 44(4): 816
- Journal of Applied Optics
- Vol. 44, Issue 4, 816 (2023)
Fig. 1. Flow chart of SVMD-HD filtering algorithm
Fig. 2. Physical image of experimental setup
Fig. 3. White light interference signal diagram.
Fig. 4. IMFs obtained by SVMD
Fig. 5. Hausdorff distance between each modal component and original signal as well as threshold
Fig. 6. Results of signal filtering in Fig.4 ( b ) by using SVMD-HD
Fig. 7. Surface measuring results with step height of 10 μm by traditional algorithm
Fig. 8. Surface measurement results of standard steps with height of 10 μm
Fig. 9. Measurement results of step devices with heights of 500 nm and 1 200 nm
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Table 1. Model of main device used in experimental setup
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Table 2. Comparison of measurement results with different algorithms
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Table 3. Repeated measurement results of proposed algorithm
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