[1] ZHU J X, LIU X M, SHI Q F, et al.Development trends and perspectives of future sensors and MEMS/NEMS[J].Micromachines, 2020, 11(1):7.
[6] BHARDWAJ R, KUMAR N, KUMAR V.Errors in micro-electro-mechanical systems inertial measurement and a review on present practices of error modelling[J].Transactions of the Institute of Measurement and Control, 2018, 40(9):2843-2854.
[8] BEKKENG J K.Calibration of a novel MEMS inertial reference unit[J].IEEE Transactions on Instrumentation and Measurement, 2009, 58(6):1967-1974.
[9] TANG Q J, WANG X J, YANG Q P.Scale factor model analysis of MEMS gyroscopes[J].Microsystem Technologies, 2017, 23(5):1215-1219.