Multi-channel laser interferometer based on automatic frequency stabilization system for improving coordinate measurement accuracy

Chengkai PANG; Qiongqiong ZHANG; Hongqiao ZHANG; Haiyan HUANG; Zejiang DENG; Guang WU

doi:10.1007/s11801-022-2063-0

[1] HUANG J, WANG Z, GAO J, et al. Overview on the profile measurement of turbine blade and its development[J]. Proceedings of the International Society for Optical Engineering, 2010, 7656:76560L.

[2] KAWALEC A, MAGDZIAK M. The selection of radius correction method in the case of coordinate measurements applicable for turbine blades[J]. Precision engineering, 2017, 49:243-252.

[3] KANG J, WU B, SUN Z, et al. Calibration method of a laser beam based on discrete point interpolation for 3D precision measurement[J]. Optics express, 2020, 28(19):27588-27599.

[4] KANG J, WU B, XUE T. Articulated laser sensor for three-dimensional precision measurement[J]. IEEE access, 2017, 7:121255-121264.

[5] DONG Z, SUN X, CHEN C, et al. An on-machine precision measurement method for API threads[J]. Measurement science and technology, 2019, 30:085006.

[6] LI M, ZHANG X, ZHANG J, et al. Long-range and high-precision fault measurement based on hybrid integrated chaotic laser[J]. IEEE photonics technology letters, 2019, 31(16):1389-1392.

[7] SONG L, SUN S, YANG Y, et al. A multi-view stereo measurement system based on a laser scanner for fine workpieces[J]. Sensors, 2019, 19(2):381.

[8] MUTILBA U, GOMEZ-ACEDO E, KORTABERRIA G, et al. Traceability of on-machine tool measurement:a review[J]. Sensors, 2017, 17(7):1605.

[9] WANG J, CHEN P, DENG Y, et al. New algorithms for motion error detection of numerical control machine tool by laser tracking measurement on the basis of GPS principle[J]. Review of scientific instruments, 2018, 89: 015104.

[10] LI Y, ZHAO Y, WANG Z, et al. Precision measurement method of laser beams based on coordinate measuring machine[J]. IEEE access, 2019, 7:112736-112741.

[11] WANG Z, ZHANG X, SHEN Y, et al. Pose calibration of line structured light probe based on ball bar target in cylindrical coordinate measuring machines[J]. Measurement, 2021, 171:108760.

[12] OSTROWSKA K, G?SKA A, KUPIEC R, et al. Comparison of accuracy of virtual articulated arm coordinate measuring machine based on different metrological models[J]. Measurement, 2018, 133:262-270.

[13] LOU S, BROWN S, SUN W, et al. An investigation of the mechanical filtering effect of tactile CMM in the measurement of additively manufactured parts[J]. Measurement, 2019, 144:173-182.

[14] CHEN W, CHEN S, ZHAI D. Coordinate stitching measurement of highly steep freeform surfaces[J]. Measurement science and technology, 2021, 32:025009.

[15] SHEN Y, ZHANG X, WANG Z, et al. A robust and efficient calibration method for spot laser probe on CMM[J]. Measurement, 2020, 154:107523.

[16] BI C, FANG J, LI K, et al. Extrinsic calibration of a laser displacement sensor in a non-contact coordinate measuring machine[J], Chinese journal of aeronautics, 2017, 30(4):1528-1537.

[17] WEI C, YAN S, LIN C, et al. Compact grating displacement measurement system with a 3×3 coupler[J]. Chinese optics letters, 2015, 13(5):051301.

[18] HSU C, CHEN H, TSENG H, et al. High displacement resolution encoder by using triple grating combination interferometer[J]. Optics and laser technology, 2018, 105:221-228.

[19] WANG X, WANG X, LU H, et al. Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy[J]. Optics and laser technology, 2001, 33(4):219-223.

[20] ZHANG M, NI C, ZHU Y, et al. Sinusoidal phase-modulating laser diode interferometer for wide range displacement measurement[J]. Applied optics, 2017, 56(20):5685-5691.

[21] JOO K, ELLIS J, BUICE E, et al. High resolution heterodyne interferometer without detectable periodic nonlinearity[J]. Optics express, 2010, 18(2):1159-1165.

[22] WANG G, JANG Y, HYUN S, et al. Absolute positioning by multi-wavelength interferometry referenced to the frequency comb of a femtosecond laser[J]. Optics express, 2015, 23(7):9121-9129.

[23] BERG S, PERSIJN S, KOK G, et al. Many-wavelength interferometry with thousands of lasers for absolute distance measurement[J]. Physical review letters, 2012, 108(18):183901.

[24] KAZIEVA T, GUBSKIY K, KUZNETSOV A, et al. 3D push-pull heterodyne interferometer for SPM metrology[J]. Applied optics, 2019, 58(15):4000-4006.

[25] PEARMAN C, ADAMS C, COX S, et al. Polarization spectroscopy of a closed atomic transition:applications to laser frequency locking[J]. Journal of physics B: atomic, molecular and optical physics, 2002, 35(24): 5141-5151.

[26] YOSHIKAWA Y, UMEKI T, MUKAE T, et al. Frequency stabilization of a laser diode with use of light-induced birefringence in an atomic vapor[J]. Applied optics, 2003, 42(33):6645-6649.

[27] ?íP O, PETR? F, MATOU?EK V, et al. Direct measurement of index of refraction of air by means of high-resolution laser interferometry[J]. Physica scripta, 2005, T118:48-50.

[28] BIRCH K, DOWNS M. An updated Edlén equation for the refractive index of air[J]. Metrologia, 1993, 30(3): 155-162.