• Optics and Precision Engineering
  • Vol. 31, Issue 11, 1641 (2023)
Zhiming ZHANG1,2 and Peng YAN1,2,*
Author Affiliations
  • 1School of Mechanical Engineering, Shandong University, Jinan25006, China
  • 2Key Laboratory of High-efficiency and Clean Mechanical Manufacture of the Ministry of Education, Jinan50061, China
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    DOI: 10.37188/OPE.20233111.1641 Cite this Article
    Zhiming ZHANG, Peng YAN. Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J]. Optics and Precision Engineering, 2023, 31(11): 1641 Copy Citation Text show less

    Abstract

    Aiming to compensate for the cross-periodic coupling of piezoelectric nano-stages with measurement delays in raster nano-scanning, particularly in high-speed scanning applications, this paper presents a robust periodic disturbance observer (PDOB) control strategy that does not require solving complex inverse models. First, an electromechanical multi-perturbation model is developed to describe the dynamic behavior of piezoelectric stage systems. Then, a PDOB control structure based on the model is constructed. The problem of optimal controller parameter solution is transformed into a mixed sensitivity optimization problem for time-delay systems with the formulated performance optimization function and robust stability condition, which is solved via the infinite-dimensional H control method. Finally, comprehensive experimental investigations are conducted on the piezoelectric nano-stage. The results indicate that the developed dynamic model can effectively fit the experimental response of the stage and that the proposed robust periodic disturbance control method has superior anti-disturbance and uncertainty compensation performance to the method without disturbance observer and the conventional PDOB control method, with improvements of >99% and >50%, respectively, in the anti-disturbance performance at the fundamental harmonic frequency.
    Zhiming ZHANG, Peng YAN. Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J]. Optics and Precision Engineering, 2023, 31(11): 1641
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