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    Journals >Acta Photonica Sinica >Volume 32 >Issue 10 >Page 1208 > Article
    • Acta Photonica Sinica
    • Vol. 32, Issue 10, 1208 (2003)
    An Astigmatic Method for Real-time Nanometer Vibration Measurement
    1,2, 1,2, 1,2, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Astigmatic Method for Real-time Nanometer Vibration Measurement[J]. Acta Photonica Sinica, 2003, 32(10): 1208 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Astigmatic Method for Real-time Nanometer Vibration Measurement[J]. Acta Photonica Sinica, 2003, 32(10): 1208
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