[1] CERVANTES V J, CARRILLO Z D, TERROSO S F, et al.. Vehicle maneuver detection with accelerometer-based classification［J］. Sensors, 2016, 16(10): 1618.

[2] DEHGHAN M A, SAGHAFI F. Decoupled scalar approach for aircraft angular motion estimation using a gyro-free IMU［J］. Journal of Dynamic Systems, Measurement, and Control, 2019, 141(12): 121004.

[3] ABANKWA N O, SQUICCIARINI G, JOHNSTON S J, et al.. An evaluation of the use of low-cost accelerometers in assessing fishing vessel stability through period of heave motion［C］. 2016 International Conference for Students on Applied Engineering (ICSAE). IEEE, 2016: 59-63.

[4] ABRYKOSOV P, PAIL R, GRUBER T, et al.. Impact of a novel hybrid accelerometer on satellite gravimetry performance［J］. Advances in Space Research, 2019, 63(10): 3235-3248.

[5] DUNCAN S, WHITE K, SA′ULILO L, et al.. Convergent validity of a piezoelectric pedometer and an omnidirectional accelerometer for measuring children′s physical activity［J］. Pediatric exercise science, 2011, 23(3): 399-410.

[6] ZHU Y, WANG D F, FU Y, et al.. Developing self-powered high performance sensors: Part I-a tri-axial piezoelectric accelerometer with an error compensation method［C］. 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). IEEE, 2018: 1-4.

[7] HAN R, WANG J, XU M, et al.. Design of a tri-axial micro piezoelectric accelerometer［C］. 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA). IEEE, 2016: 66-70.

[8] GAO Z, ZHANG D. Design, analysis and fabrication of a multidimensional acceleration sensor based on fully decoupled compliant parallel mechanism［J］. Sensors and actuators A: physical, 2010, 163(1): 418-427.

[9] AMARASINGHE R, DAO D V, TORIYAMA T, et al.. Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer［J］. Journal of Micromechanics and Microengineering, 2005, 15(9): 1745.

[10] SANKAR A R, DAS S. A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass［J］. Sensors and Actuators A: Physical, 2013, 189: 125-133.

[11] ROY A L, BHATTACHARYYA T K. Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers［J］. Microsystem Technologies, 2015, 21(1): 55-63.

[12] TAVAKOLI H, MOMEN H G, SANI E A. Designing a new high performance 3-axis MEMS capacitive accelerometer［C］. 2017 Iranian Conference on Electrical Engineering (ICEE). IEEE, 2017: 519-522.

[13] AMARASINGHE R, DAO D V, TORIYAMA T, et al.. Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer［J］. Smart materials and structures, 2006, 15(6): 1691.

[14] HSU Y W, CHEN J Y, CHIEN H T, et al.. New capacitive low-g triaxial accelerometer with low cross-axis sensitivity［J］. Journal of Micromechanics and Microengineering, 2010, 20(5): 055019.

[15] KAVITHA S, DANIEL R J, SUMANGALA K. Design and analysis of MEMS comb drive capacitive accelerometer for SHM and seismic applications［J］. Measurement, 2016, 93: 327-339.

[16] DONG P, LI X, YANG H, et al.. High-performance monolithic triaxial piezoresistive shock accelerometers［J］. Sensors and Actuators A: Physical, 2008, 141(2): 339-346.

[17] XU Y, ZHAO L, JIANG Z, et al.. Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams［J］. Sensors and Actuators A: Physical, 2016, 247: 1-11.

[18] LEE J M, JANG C U, CHOI C J, et al.. High-shock silicon accelerometer with a plate spring［J］. International Journal of Precision Engineering and Manufacturing, 2016, 17(5): 637-644.

[19] BAE K M, LEE J M, KWON K B, et al.. High-shock silicon accelerometer with suspended piezoresistive sensing bridges［J］. Journal of Mechanical Science and Technology, 2014, 28(4): 1449-1454.

[20] KUELLS R, NAU S, SALK M, et al.. Novel piezoresistive high-g accelerometer geometry with very high sensitivity-bandwidth product［J］. Sensors and Actuators A: Physical, 2012, 182: 41-48.

[21] PRIYA S, INMAN D J. Energy Harvesting Technologies ［M］. New York: Springer, 2009.

[22] YAN B, YIN Y G, DONG J X. Improvement of bias stability of micromechanical silicon resonant accelerometer at room temperature［J］. Opt. Precision Eng., 2016, 24(5): 1050-1056.(in Chinese)

[23] ZHAO J, SHI Q, XIA G M, et al.. Implementation and measurement of a miniaturized silicon resonant accelerometer［J］. Opt. Precision Eng., 2016, 24(8): 1927-1933. (in Chinese)

[24] TAO T K, LIU Y F, DONG J X. Design and experiment of high-overload capacitive micro-machined accelerometers［J］. Opt. Precision Eng., 2016, 22(4): 918-925. (in Chinese)