• Acta Photonica Sinica
  • Vol. 48, Issue 12, 1216001 (2019)
Hui-dong YANG1、1、2、2, Jin-hui XIA1、1、*, Si-ran PENG1、1, Jing-yan ZHANG1、1, Fei-xiong BAO1、1, and Ya-qing LIU1、1
Author Affiliations
  • 1School of Information Science and Technology, Jinan University, Guangzhou 510632, China
  • 2Jinan University Shaoguan Research Institute, Shaoguan, Guangdong 512027, China
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    DOI: 10.3788/gzxb20194812.1216001 Cite this Article
    Hui-dong YANG, Jin-hui XIA, Si-ran PENG, Jing-yan ZHANG, Fei-xiong BAO, Ya-qing LIU. Effect of Different Oxygen Content of Tantalum Oxide on Electrochromic Properties of Tungsten Oxide[J]. Acta Photonica Sinica, 2019, 48(12): 1216001 Copy Citation Text show less
    电致变色器件的封装示意图Package diagram of electrochromic device
    Fig. 1. 电致变色器件的封装示意图Package diagram of electrochromic device
    不同氧含量的TaOx的XRD图XRD patterns of TaOx with different oxygen content
    Fig. 2. 不同氧含量的TaOx的XRD图XRD patterns of TaOx with different oxygen content
    氧化钨及不同氧含量下氧化钽的SEM图SEM images of tungsten oxide and tantalum oxide with different oxygen content
    Fig. 3. 氧化钨及不同氧含量下氧化钽的SEM图SEM images of tungsten oxide and tantalum oxide with different oxygen content
    薄膜的全谱透射图谱Full spectrum transmission spectrum of thin films
    Fig. 4. 薄膜的全谱透射图谱Full spectrum transmission spectrum of thin films
    薄膜的光谱响应测试Spectral response test diagram of the thin film
    Fig. 5. 薄膜的光谱响应测试Spectral response test diagram of the thin film
    薄膜的电流沉积Electrodeposition of thin films
    Fig. 6. 薄膜的电流沉积Electrodeposition of thin films
    薄膜的着色效率Diagram of coloring efficiency of films
    Fig. 7. 薄膜的着色效率Diagram of coloring efficiency of films
    器件的光谱动力学测试图谱Spectrodynamics test of the device
    Fig. 8. 器件的光谱动力学测试图谱Spectrodynamics test of the device
    不同电压下器件的着色效率及电荷容量图谱Coloring efficiency and charge-capacity maps of devices at different voltages
    Fig. 9. 不同电压下器件的着色效率及电荷容量图谱Coloring efficiency and charge-capacity maps of devices at different voltages
    TargetPower sourceWorking pressure/PaOxygen concentrationSupptering power/WFilm thickness/nm
    WDirect current2.030%150350
    NiDirect current2.06%150350
    TaDirect current1.010%~40%148350
    Table 1. The preparation process parameters of the film
    Oxygen content10%12.5%15%20%40%
    Ta29.74%28.30%26.35%26.12%25.18%
    O60.89%62.04%64.05%63.99%62.19%
    Ta:O1:2.041:2.191:2.431:2.451:2.48
    Table 2. Element ratio of TaO x with different oxygen doping contents
    Hui-dong YANG, Jin-hui XIA, Si-ran PENG, Jing-yan ZHANG, Fei-xiong BAO, Ya-qing LIU. Effect of Different Oxygen Content of Tantalum Oxide on Electrochromic Properties of Tungsten Oxide[J]. Acta Photonica Sinica, 2019, 48(12): 1216001
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