The 193 nm excimer laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used for the quantification of 13 elements (Li, B, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu and Ba) in the plant samples (GBW070602, GBW070605 and GBW08514). Indium standard solution with known concentration was mixed into samples and used as an internal standard. Afterwards the samples were ground again and pressed to disks. NIST SRM 610 glass material reference standard was used as the external standard in the LA-ICP-MS measurements. In contrast to longer wavelength ablation techniques, in this experiment a round crater with low deposits could be achieved during ablation. And another study was done on the effect of homogenization over the powder disk. It was clearly shown that the analytical results under the condition of 193 nm LA-ICP-MS, using NIST SRM 610 as the external standard for analysis of pressed disk of plant sample, are in good agreement with certified values.