• Frontiers of Optoelectronics
  • Vol. 8, Issue 3, 298 (2015)
Qingsong LEI* and Jiang LI
Author Affiliations
  • School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
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    DOI: 10.1007/s12200-014-0372-z Cite this Article
    Qingsong LEI, Jiang LI. High conductive and transparent Al doped ZnO films for a-SiGe:H thin film solar cells[J]. Frontiers of Optoelectronics, 2015, 8(3): 298 Copy Citation Text show less
    References

    [1] Nakagawara O, Kishimoto Y, Seto K, Koshido Y, Yoshino Y, Makino T. Moisture-resistant ZnO transparent conductive films with Ga heavy doping. Applied Physics Letters, 2006, 89(9): 091904-1– 091904-3

    [2] Bhosle V, Tiwari A, Narayan J. Metallic conductivity and metalsemiconductor transition in Ga-doped ZnO. Applied Physics Letters, 2006, 88(3): 032106-1–032106-3

    [3] Vandendonker M, Gordijn A, Stiebig H, Finger F, Rech B, Stannowski B, Bartl R, Hamers E, Schlatmann R, Jongerden G. Flexible amorphous and microcrystalline silicon tandem solar modules in the temporary superstrate concept. Solar Energy Materials and Solar Cells, 2007, 91(7): 572–580

    [4] Hao X T, Ma J, Zhang D H, Yang Y G, Ma H L, Cheng C F, Liu X D. Comparison of the properties for ZnO:Al films deposited on polyimide and glass substrates. Materials Science and Engineering B, 2002, 90(1–2): 50–54

    [5] Vanheusden K, Warren W L, Seager C H, Tallant D R, Voigt J A, Gnade B E. Mechanisms behind green photoluminescence in ZnO phosphor powders. Journal of Applied Physics, 1996, 79(10): 7983– 7990

    [6] Chopra K L, Major S, Pandya D K. Transparent conductors-a status review. Thin Solid Films, 1983, 102(1): 1–46

    [7] Granqvist C G. Window coatings for the future. Thin Solid Films, 1990, 193–194(Part 2): 730–741

    [8] Zhang D H, Yang T L, Ma J, Wang Q P, Gao R W, Ma H L. Preparation of transparent conducting ZnO:Al films on polymer substrates by r.f. magnetron sputtering. Applied Surface Science, 2000, 158(1–2): 43–48

    [9] Fortunato E, Nunes P, Marques A, Costa D, águas H, Ferreira I, Costa M E V, Godinho M H, Almeida P L, Borges J P, Martins R. Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering. Surface and Coatings Technology, 2002, 151–152(1): 247–251

    [10] Suzuki A, Matsushita T, Wada N, Sakamoto Y, Okuda M. Trasparent conducting Al-doped ZnO thin films prepared by pulsed laser deposition. Japanese Journal of Applied Physics, 1996, 35(Part 2, No. 1A): L56–L59

    [11] Minami T, Sato H, Sonohara H, Takata S, Miyata T, Fukuda I. Preparation of milky transparent conducting ZnO films with textured surface by atmospheric chemical vapour desposition using Zn (C5H7O2)2. Thin Solid Films, 1994, 253(1–2): 14–19

    [12] Song J, Park I J, Yoon K H. Electrical and optical properties of ZnO thin films prepared by the pyrosol method. Journal of the Korean Physical Society, 1996, 29(2): 219–224

    [13] Hu J H, Gordon R G. Textured aluminum–doped zinc oxide thin films from atmospheric pressure chemical–vapor deposition. Journal of Applied Physics, 1992, 71(2): 880–890

    [14] Lai K C,Wang J H, Lu C H, Tsai F J, Yeh C H, HoungMP. Plasmainduced TCO texture of ZnO:Ga back contacts on silicon thin film solar cells. Solar Energy Materials and Solar Cells, 2011, 95(2): 415–418

    [15] Zhang W D, Bunte E, Ruske F, Kohl D, Besmehn A, Worbs J, Siekmann H, Kirchhoff J, Gordijn A, Hüpkes J. As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering. Thin Solid Films, 2012, 520(12): 4208–4213

    [16] Chen X L, Wang F, Geng X H, Zhang D K, Wei C C, Zhang X D, Zhao Y. New natively textured surface Al-doped ZnO-TCOs for thin film solar cells via magnetron sputtering. Materials Research Bulletin, 2012, 47(8): 2008–2011

    [17] Kluth O, Schope G, Hüpkes J, Agashe C, Müller J, Rech B. Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour. Thin Solid Films, 2003, 442(1–2): 80–85

    [18] Mandal S, Singha R K, Dhar A, Ray S K. Optical and structural characteristics of ZnO thin films grown by rf magnetron sputtering. Materials Research Bulletin, 2008, 43(2): 244–250

    [19] Ellmer K. Resistivity of polycrystalline zinc oxide films: current status and physical limit. Journal of Physics D, Applied Physics, 2001, 34(21): 3097–3108

    [20] Fang G J, Li D J, Yao B L. Fabrication and vacuum annealing of transparent conductive ZAO thin films prepared by DC magnetron sputtering. Vacuum, 2002, 68(4): 363–372

    [21] Oh B Y, Jeong M C, Myoung J M. Stabilization in electrical characteristics of hydrogen-annealed ZnO:Al films. Applied Surface Science, 2007, 253(17): 7157–7161

    [22] Wolff P A. Theory of the band structure of very degenerate semiconductors. Physical Review, 1962, 126(2): 405–412

    [23] Burstein E. Anomalous optical absorption limit in InSb. Physical Review, 1954, 93(3): 632–633

    Qingsong LEI, Jiang LI. High conductive and transparent Al doped ZnO films for a-SiGe:H thin film solar cells[J]. Frontiers of Optoelectronics, 2015, 8(3): 298
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