• Optics and Precision Engineering
  • Vol. 30, Issue 20, 2467 (2022)
Cong ZHANG, Wenzheng LIU, Fajie DUAN*, Xiao FU, and Xinxing WANG
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin300072, China
  • show less
    DOI: 10.37188/OPE.20223020.2467 Cite this Article
    Cong ZHANG, Wenzheng LIU, Fajie DUAN, Xiao FU, Xinxing WANG. Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide[J]. Optics and Precision Engineering, 2022, 30(20): 2467 Copy Citation Text show less
    Transceiver split laser five-degree of freedom measurement structure
    Fig. 1. Transceiver split laser five-degree of freedom measurement structure
    Optical path of straightness measurement unit
    Fig. 2. Optical path of straightness measurement unit
    Installation diagram of beam angle drift measurement optical path
    Fig. 3. Installation diagram of beam angle drift measurement optical path
    Optical path of telescopic objective
    Fig. 4. Optical path of telescopic objective
    Schematic diagram of beam angle drift measurement
    Fig. 5. Schematic diagram of beam angle drift measurement
    Schematic diagram of angular crosstalk error
    Fig. 6. Schematic diagram of angular crosstalk error
    QD measurement model based on Gaussian beam
    Fig. 7. QD measurement model based on Gaussian beam
    Relationship of the spot position and its relative position on QD (x-direction)
    Fig. 8. Relationship of the spot position and its relative position on QD (x-direction)
    Straightness calibration system at fixed distance
    Fig. 9. Straightness calibration system at fixed distance
    Schematic diagram of calibration interval division under long distance
    Fig. 10. Schematic diagram of calibration interval division under long distance
    Schematic diagram of QD measurement zero offset under long distance
    Fig. 11. Schematic diagram of QD measurement zero offset under long distance
    Schematic diagram of QD measurement zero offset correction
    Fig. 12. Schematic diagram of QD measurement zero offset correction
    Measurement device of five-degree of freedom
    Fig. 13. Measurement device of five-degree of freedom
    Calibration experiment at fixed distance
    Fig. 14. Calibration experiment at fixed distance
    Calibration results at fixed distances
    Fig. 15. Calibration results at fixed distances
    Calibration effect test results
    Fig. 16. Calibration effect test results
    QD measurement zero deviation correction experiment
    Fig. 17. QD measurement zero deviation correction experiment
    Simulation experiment of angular crosstalk error
    Fig. 18. Simulation experiment of angular crosstalk error
    Test results of angle crosstalk error compensation
    Fig. 19. Test results of angle crosstalk error compensation
    Straightness measurement stability test results
    Fig. 20. Straightness measurement stability test results
    节点/m多项式系数
    A4A3A2A1
    1-90.94412.4042.221227.18
    2166.29467.4413.481224.43
    3-49.24423.0255.571239.39
    4-7.69375.2442.291260.45
    5-43.58437.3934.511278.86
    Table 1. Polynomial coefficients obtained from calibration at fixed distance
    节点/m常数项A0
    10.00
    20.43
    3-1.53
    4-1.99
    50.00
    Table 2. Zero offset correction value of QD measurement
    Cong ZHANG, Wenzheng LIU, Fajie DUAN, Xiao FU, Xinxing WANG. Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide[J]. Optics and Precision Engineering, 2022, 30(20): 2467
    Download Citation