Cong ZHANG, Wenzheng LIU, Fajie DUAN, Xiao FU, Xinxing WANG. Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide[J]. Optics and Precision Engineering, 2022, 30(20): 2467
- Optics and Precision Engineering
- Vol. 30, Issue 20, 2467 (2022)
Fig. 1. Transceiver split laser five-degree of freedom measurement structure
Fig. 2. Optical path of straightness measurement unit
Fig. 3. Installation diagram of beam angle drift measurement optical path
Fig. 4. Optical path of telescopic objective
Fig. 5. Schematic diagram of beam angle drift measurement
Fig. 6. Schematic diagram of angular crosstalk error
Fig. 7. QD measurement model based on Gaussian beam
Fig. 8. Relationship of the spot position and its relative position on QD （x -direction）
Fig. 9. Straightness calibration system at fixed distance
Fig. 10. Schematic diagram of calibration interval division under long distance
Fig. 11. Schematic diagram of QD measurement zero offset under long distance
Fig. 12. Schematic diagram of QD measurement zero offset correction
Fig. 13. Measurement device of five-degree of freedom
Fig. 14. Calibration experiment at fixed distance
Fig. 15. Calibration results at fixed distances
Fig. 16. Calibration effect test results
Fig. 17. QD measurement zero deviation correction experiment
Fig. 18. Simulation experiment of angular crosstalk error
Fig. 19. Test results of angle crosstalk error compensation
Fig. 20. Straightness measurement stability test results
| ||||||||||||||||||||||||||||||||||
Table 1. Polynomial coefficients obtained from calibration at fixed distance
|
Table 2. Zero offset correction value of QD measurement
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20