• Optics and Precision Engineering
  • Vol. 26, Issue 10, 2389 (2018)
LI Bo1,2, CHEN Ming1, WU Jia-xing1, LIU Jun-nan1, and XUE Song1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/ope.20182610.2389 Cite this Article
    LI Bo, CHEN Ming, WU Jia-xing, LIU Jun-nan, XUE Song. Applications of glow discharge cleaning in synchrotron radiation beamlines[J]. Optics and Precision Engineering, 2018, 26(10): 2389 Copy Citation Text show less
    References

    [1] ROSENBERG R A, MANCINI D C. Deposition of carbon on gold using synchrotron radiation [J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990, 291(1-2): 101-106.

    [2] JOHNSON E D, GARRETT R F. In situ reactive cleaning of X-ray optics by glow discharge [J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988, 266(1): 381-385.

    [3] ROSENBERG R A, SMITH J A, WALLACE D J. Plasma cleaning of beamline optical components: Contamination and gas composition effects [J]. Review of Scientific Instruments, 1992, 63(1): 1486-1489.

    [4] HANSEN R WC, WOLSKE J, WALLACE D, et al.. Cleaning of optical surfaces with photogenerated reactants [J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1994, 347(1-3): 249-253.

    [5] NAITO T, TADANO M, TERUNUMA N, et al.. Investigation of carbon contamination on SR-irradiated devices [J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2004, 527(3): 624-631.

    [6] KOIDE T, YANAGIHARA M, AIURA Y, et al.. Glow-discharge cleaning in oxygen of carbon-contaminated optical elements [J]. Physica Scripta, 1987, 35(3): 313-317.

    [7] KOIDE T, SHIDARA T, TANAKA K, et al.. In situ dc oxygen‐discharge cleaning system for optical elements [J]. Review of Scientific Instruments, 1989, 60(7): 2034-2037.

    [8] SONG Y, LU Q P, GONG X P, et al.. Cleaning of carbon pollution on the surface of multilayer film reflector of polar ultraviolet lithography [J]. Opt. Precision Eng., 2017 (11): 2835-2844. (in Chinese)

    [9] CUXART M G, REYES-HERRERA J, SICS I, et al.. Remote plasma cleaning of optical surfaces: Cleaning rates of different carbon allotropes as a function of RF powers and distances [J]. Applied Surface Science, 2016, 362(Supplement C): 448-458.

    [10] ZHANG Y F, LUO H X, GUO Z, et al.. Cleaning of carbon-contaminated optics using O2/Ar plasma [J]. Nuclear Science and Techniques, 2017, 28(9): 16-20.

    [11] ZHONG P F, ZHOU H J, HO T L, et al.. Study on the activation oxygen of synchrotron radiation in the process of cleaning optical elements[J]. Opt .Precision Eng., 2007 (12): 1921-1925.

    [12] TOYOSHIMA A, KIKUCHI T, TANAKA H, et al.. In situ removal of carbon contamination from optics in a vacuum ultraviolet and soft X-ray undulator beamline using oxygen activated by zeroth-order synchrotron radiation [J]. Journal of Synchrotron Radiation, 2012, 19(5): 722-727.

    [13] LI J H, HU J SH, WANG X M, et al.. Study on the vacuum chamber wall treatment of the EAST superconducting tokamak [J]. Journal of Physics, 2012, 61 (20): 310-316. (in Chinese)

    [14] BI H L, HU J SH, YU Y W, et al.. Study on glow discharge cleaning of HT-7 tokamak under Full metal wall and lithium condition [J]. Journal of Vacuum Science and Technology, 2014, 34(7): 731-736. (in Chinese)

    [15] LI J, SHIMADA M, ZHAO Y, et al.. Wall conditioning towards the utilization in ITER [J]. Journal of Nuclear Materials, 2011, 415(1): S35-S41.

    [16] WANG ZH W, YAN D H, ZHANG F M, et al.. Experimental study on helium glow discharge cleaning of HL-1M device [J]. Vacuum and Low Temperature, 2002, 8 (2): 46-50. (in Chinese)

    [17] CAI X, CAO Z, HUANG X M, et al.. Application of RF-assisted DC glow discharge cleaning in HL-2A device [J]. Journal of Vacuum Science and Technology, 2014, 34(6): 645-649. (in Chinese)

    [18] BUCALOSSI J, BROSSET C, GARNIER D, et al.. The conditioning procedures in Tore Supra after CIEL implementation [J]. Journal of Nuclear Materials, 2003, 313-316: 263-268.

    [19] CHRISTIAN.DAY. The use of a high-resolution quadrupole gas mass spectrometer system for selective detection of helium and deuterium [J]. Vacuum, 1998, 51(1): 21-30.

    [20] HUANG T B, CHEN X, TIAN X Q, et al.. Improvement of materials surface properties by RF glow discharge treatment [J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2006, 24(4): 1568-1571.

    LI Bo, CHEN Ming, WU Jia-xing, LIU Jun-nan, XUE Song. Applications of glow discharge cleaning in synchrotron radiation beamlines[J]. Optics and Precision Engineering, 2018, 26(10): 2389
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