• Chinese Optics Letters
  • Vol. 8, Issue s1, 114 (2010)
Yonghong Meng1、2, She Chen1、2, and Gang Jin1
Author Affiliations
  • 1Key Laboratory of Microgravity (National Microgravity Laboratory), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/COL201008s1.0114 Cite this Article Set citation alerts
    Yonghong Meng, She Chen, Gang Jin. Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate[J]. Chinese Optics Letters, 2010, 8(s1): 114 Copy Citation Text show less
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    CLP Journals

    [1] Fan Zhang, Cong Wang, Kai Yin, Xinran Dong, Yuxin Song, Yaxiang Tian, Ji’an Duan. Investigation on optical and photoluminescence properties of organic semiconductor Al-Alq3 thin films for organic light-emitting diodes application[J]. Chinese Optics Letters, 2017, 15(11): 111602

    Data from CrossRef

    [1] G. Jin, Y.H. Meng, L. Liu, Y. Niu, S. Chen, Q. Cai, T.J. Jiang. Development of biosensor based on imaging ellipsometry and biomedical applications. Thin Solid Films, 519, 2750(2011).

    [2] Seung Woo Lee, Sin Yong Lee, Garam Choi, Heui Jae Pahk. Co-axial spectroscopic snap-shot ellipsometry for real-time thickness measurements with a small spot size. Optics Express, 28, 25879(2020).

    [3] Seung Woo Lee, Garam Choi, Sin Yong Lee, Yeongchan Cho, Heui Jae Pahk. Coaxial spectroscopic imaging ellipsometry for volumetric thickness measurement. Applied Optics, 60, 67(2021).

    [4] Y.H. Meng, G. Jin. Rotating compensator sampling for spectroscopic imaging ellipsometry. Thin Solid Films, 519, 2742(2011).

    [5] Matthias Duwe, Jan-Henrik Quast, Stefan Schneider, Daniel Fischer, Uwe Beck. Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry. Journal of Vacuum Science & Technology B, 37, 062908(2019).

    [6] Min-gab Kim. Spectroscopic imaging ellipsometry for two-dimensional thin film thickness measurement using a digital light processing projector. Measurement Science and Technology, 33, 095016(2022).

    Yonghong Meng, She Chen, Gang Jin. Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate[J]. Chinese Optics Letters, 2010, 8(s1): 114
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