• Chinese Physics B
  • Vol. 29, Issue 10, (2020)
Bin Wang1、†, Sheng Hu1, Yue Feng1, Peng Li2, Hui-Yong Hu1, and Bin Shu1
Author Affiliations
  • 1State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 7007, China
  • 2Xi’an Microelectronic Technology Institute, Xi’an 710054, China
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    DOI: 10.1088/1674-1056/ab99b5 Cite this Article
    Bin Wang, Sheng Hu, Yue Feng, Peng Li, Hui-Yong Hu, Bin Shu. Simulation study of device physics and design of GeOI TFET with PNN structure and buried layer for high performance[J]. Chinese Physics B, 2020, 29(10): Copy Citation Text show less

    Abstract

    Large threshold voltage and small on-state current are the main limitations of the normal tunneling field effect transistor (TFET). In this paper, a novel TFET with gate-controlled P+N+N+ structure based on partially depleted GeOI (PD-GeOI) substrate is proposed. With the buried P+-doped layer (BP layer) introduced under P+N+N+ structure, the proposed device behaves as a two-tunneling line device and can be shut off by the BP junction, resulting in a high on-state current and low threshold voltage. Simulation results show that the on-state current density Ion of the proposed TFET can be as large as 3.4 × 10-4 A/μm, and the average subthreshold swing (SS) is 55 mV/decade. Moreover, both of Ion and SS can be optimized by lengthening channel and buried P+ layer. The off-state current density of TTP TFET is 4.4 × 10-10 A/μm, and the threshold voltage is 0.13 V, showing better performance than normal germanium-based TFET. Furthermore, the physics and device design of this novel structure are explored in detail.
    Bin Wang, Sheng Hu, Yue Feng, Peng Li, Hui-Yong Hu, Bin Shu. Simulation study of device physics and design of GeOI TFET with PNN structure and buried layer for high performance[J]. Chinese Physics B, 2020, 29(10):
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