[1] BARBRI N, MIRHISSE J, IONESCU R, et al.. An electronic nose system based on a micro-machined gas sensor array to assess the freshness of sardines ［J］. Sensors and Actuators B: Chemical, 2009, 141: 538-543.

[2] IVANOV P, LLOBET E, VERGARA A, et al.. Towards a micro-system for monitoring ethylene in warehouses ［J］. Sensors and Actuators B, 2005,111-112: 63-70.

[3] SZECOWKA P M, SZCZUREK A, LICZNERSKI B W. On reliability of neural network sensitivity analysis applied for sensor array optimization ［J］. Sensors and Actuators B: Chemical, 2011, 157: 298-303.

[4] MONTOLIU I, TAULER R, PADILLA M, et al.. Multivariate curve resolution applied to temperature-modulated metal oxide gas sensors ［J］. Sensors and Actuators B: Chemical, 2010, 145: 464-473.

[5] WU D J, ZHANG Q, GUO D M. Experiment on bending of Al2O3 ceramic slice with CO2 CW-laser［J］. Opt. Precision Eng., 2009, 17(10): 2473-2478. (in Chinese)

[6] SHI Y F, SHI Y B, LIU Y H, et al.. Sulfur dioxide poison gas sensor based on MEMS laminated microstructure ［J］. Opt. Precision Eng., 2008,16(6): 1075-1081. (in Chinese)

[7] PISARKIEWICZ T, SUTOR A, POTEMPA P, et al.. Micro sensor based on low temperature cofired ceramics and gas-sensitive thin film ［J］. Thin Solid films, 2003(436): 84-89.

[8] RETTIG F, MOOS R. Ceramic meso-hotplates for gas sensors ［J］. Sensors and Actuators B, 2004(103): 91-97.

[9] VASILIEV A A, PAVELKO R G, GOGISH S Y, et al.. Alumina MEMS platform for impulse semiconductor and IR optic gas sensors［J］. Sensors and Actuators B, 2008, 132: 216-223.

[10] VASILIEV A A, GOGISH S Y. The optimization of high-temperature sensor microhotplates based on thin alumina membranes ［J］. Eurosensors XVII, 2003: 344-347.

[11] XUE Y B, TANG ZH A. The design and thermal property study of suspended hotplate based on ceramic substrate ［J］. Journal of Optoelectronics·Laser, 2009,20(6): 725-729. (in Chinese)

[12] XUE Y B, TANG ZH A. The study of high-temperature working gas sensors based on ceramic hot-plate［J］. Journal of Optoelectronics·Laser, 2011,22(7): 976-979. (in Chinese)

[13] SIMON I, BARSAN N, BAUER M, et al.. Micromachined metal oxide gas sensors: opportunities to improve sensor performance ［J］. Sensors and Actuators B, 2001,73: 1-26.

[14] BAUER R, GOLONKA L J, KIRCHNER T, et al.. Optimization of thermal distribution in ceramics and LTCC structures applied to sensor elements ［J］. Microelectronics International, 1998,15(2): 34-38.