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    Journals >Optics and Precision Engineering >Volume 16 >Issue 3 >Page 484 > Article
    • Optics and Precision Engineering
    • Vol. 16, Issue 3, 484 (2008)
    Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J]. Optics and Precision Engineering, 2008, 16(3): 484 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J]. Optics and Precision Engineering, 2008, 16(3): 484
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