Xiaoqian NIU, Pengfei MIAO, Hanlin WANG, Xiaodong WANG, Bo CHEN. Preparation of EUV Filter at 17.1 nm[J]. Optics and Precision Engineering, 2023, 31(2): 141
- Optics and Precision Engineering
- Vol. 31, Issue 2, 141 (2023)
Fig. 1. Schematic of transmission filter
Fig. 2. Absorption coefficient and trasmission of different materials
Fig. 3. Transmission of 150 nm Al in visible
Fig. 4. Transmission of Al with different thicknesses
Fig. 5. Preparation of filter
Fig. 6. Al filter sample with mesh supported
Fig. 7. Surface topography of mesh-support filter under microscope
Fig. 8. Comparison between the transmission of ESP and sample
Fig. 9. [in Chinese]
Fig. 10. Comparison between simulated transmission and measured transmission of filter
Fig. 11. XPS survey of the Al film on the surfaces
Fig. 12. Pinholes on the surface of a filter
Fig. 13. Transmission of the filter in visible region
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Table 1. [in Chinese]
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Table 2. Atomic ratio on the surface of the thin films
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