• Optical Instruments
  • Vol. 45, Issue 4, 1 (2023)
Peigang YANG1, Hongzhi JIA1, Kunyue FU1, Guanglin LI1, Wei WANG1, Lihua LEI2, and Tao JIN1、*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
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    DOI: 10.3969/j.issn.1005-5630.2023.004.001 Cite this Article
    Peigang YANG, Hongzhi JIA, Kunyue FU, Guanglin LI, Wei WANG, Lihua LEI, Tao JIN. Study on all-fiber sinusoidal phase modulation interferometer for displacement measurement[J]. Optical Instruments, 2023, 45(4): 1 Copy Citation Text show less

    Abstract

    To solve the short working distance and small measurement range of all-fiber interferometer, we proposed an all-fiber interferometry system based on sinusoidal phase modulation. An electro-optical modulator is combined in reference arm to generate modulated reference beam, which interferes with the target reflected beam received by the collimator. After extracting orthogonal components from interference signals according to phase-locked amplification principle, an observation model composed of orthogonal components is first established. The amplitude and bias of the orthogonal components are iteratively estimated and corrected by Kalman filtering to reduce the amplitude drift and additional bias caused by phase delay, modulation depth drift, parasitic interference, etc. Then the inverse tangent method is used to demodulate the phase difference between the reflected light and the reference light. The phase solution simulation and displacement measurement experiments of analog interference signals are carried out. Simulation and experiment verify the validity of the proposed method. The experimental results show that the displacement measurement system can achieve a working range of 20 cm and a measurement accuracy of 10 nm.
    Peigang YANG, Hongzhi JIA, Kunyue FU, Guanglin LI, Wei WANG, Lihua LEI, Tao JIN. Study on all-fiber sinusoidal phase modulation interferometer for displacement measurement[J]. Optical Instruments, 2023, 45(4): 1
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