[1] LIU J B, XUE H, GU W Q. Precision Stage Technology Used in Micro/nano-Fabrication ［M］. Beijing: Beijing University of Technology Press, 2004: 205-272. (in Chinese)

[2] ZHANG M, ZHU Y, DUAN G H. Micro-vibration of ultra-precision gas bearing linear motion stage and its elimination ［J］. Design and Research, 2005,(11):47-49. (in Chinese)

[3] SEUNG-KOOK R, SOOHYUN K, YOONKEUN K, et al.. A linear air bearing stage with active magnetic preloads for ultraprecise straight motion ［J］. Precision Engineering, 2010, 34(1):186-194.

[4] KENJI K, TAKESHI A, KOTARO T, et al.. Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings ［J］. Precision Engineering, 2010, 34(3):526-533.

[5] LIU Q, ZHANG C P. H-type air-bearing motion stage driven by linear motors ［J］. Opt. Precision Eng., 2007,15(10):1540-1546. (in Chinese)

[6] YE SH L, LI D SH. Study on mechanical characteristics of aerostatic bearing with finite volume method ［J］. Opt. Precision Eng., 2008, 16(5):809-814. (in Chinese)

[7] ZHANG W, LI D SH, YU J, et al.. Capacitive measuring method of air-film thickness of aerostatic bearing ［J］. Transducer and Microsystem Technologies, 2012,31(7):67-69. (in Chinese)

[8] JIA S T, ZHU Y, YANG K M, et al.. Design of disturbance observer for ultra-precision stages ［J］. Microfabrication Technology, 2007,(4):39-42. (in Chinese)

[9] WANG G L, LI SH Y, SU SH P. A study on aerostatic slider with high stiffness and high damping for ultraprecision applications ［J］. Aviation Precision Manufacturing Technology, 2001, 37(6):1-5. (in Chinese)

[10] SHINNO H,HASHIZUME H. Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers ［J］. Annals of the CIRP, 1999,48(1):289-292.

[11] GEORGE E. Control System Design Guide ［M］. Beijing:Publishing house of electronics industry, 2006: 95-112. (in Chinese)

[12] CAI T, ZHANG M, ZHU Y, et al.. Dynamic modeling and analysis of a 3-DOF ultra-precision positioning stage with air bearing ［J］. Procedia Engineering, 2011,16:264-270.

[13] YUSAKU FUJII, KOICHI MARU, TAO JIN. Method for evaluating the electrical and mechanical characteristics of a voice coil actuator ［J］. Precision Engineering, 2010, 34(4):802-806.

[14] XU X H, WANG B, HAN X D, et al.. Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators ［J］. Opt. Precision Eng., 2011,19(6):1320-1325. (in Chinese)

[15] LIU J K. The Advanced PID Control and Simulation of MATLAB ［M］. Beijing: Publishing House of Electronics Industry, 2004:47-48. (in Chinese)