• Acta Photonica Sinica
  • Vol. 46, Issue 8, 816003 (2017)
SHANG Peng1、2、*, JI Yi-qin1, ZHAO Dao-ling3, XIONG Sheng-ming4, LIU Hua-song, LI Ling-hui4, and TIAN Dong4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.3788/gzxb20174608.0816003 Cite this Article
    SHANG Peng, JI Yi-qin, ZHAO Dao-ling, XIONG Sheng-ming, LIU Hua-song, LI Ling-hui, TIAN Dong. Thermal Stability of Mid-infrared SiO2 Thin Films Deposited by Dual Ion Beam Sputtering Method[J]. Acta Photonica Sinica, 2017, 46(8): 816003 Copy Citation Text show less
    References

    [1] SCHMID F. KHATRAK C P. Current status of sapphire technology for window and dome applications[C]. SPIE, 1989, 1112: 25-30.

    [2] SCHMID F, KHATRAK C P. Correlation of sapphire quality with uniformity and optical properties[C]. SPIE, 1997, 3060: 250-257.

    [3] PATEL B S, ZAIDI Z H. The suitability of sapphire for laser windows[J]. Measurement Science and Technology, 1999, 10(3): 146.

    [4] HARRIS D C, SCHMID F, BLACK D R, et al. Factors that influence mechanical failure of sapphire at high temperatures[C].AeroSense'97. International Society for Optics and Photonics, 1997, 3060: 226-235.

    [5] UNDA F, JOHNSON, MARK B. Compressive coatings for strengthened sapphire[C]. SPIE, 1999, 3705: 130-141.

    [6] LI Qiang, LIU Zheng-tang. Investigation of improving strength and transmission for sapphire[J]. Materials Science and technology, 2007, 15(1): 52-54.

    [7] DALE C N, TRAGGIS N, LYNGNES O. Thermal robustness of ion beam sputtered TiO2/SiO2, TiO2/Al2O3 and Al2O3/SiO2 IR anti-reflective coatings on YAG and sapphire substrates[C]. SPIE, 2009, 7504: 750406.

    [8] WANG J, XIONG Y, WANG D, et al. Study on preparation and characters of one multi-function SiO2 film[J]. Physics Procedia, 2011, 18: 143-147.

    [9] WU W F, CHIOU B S. Properties of radio frequency magnetron sputtered silicon dioxide films[J]. Applied Surface Science, 1996, 99(3): 237-243.

    [10] EDLOU S M, SMAJKIEWICZ A, GHANIM A. Optical properties and environmental stability of oxide coatings deposited by reactive sputtering[J]. Applied Optics, 1993, 32(28): 5601-5605.

    [11] TSAI R Y, CHANG C S, CHU C W, et al. Thermally stable narrow-bandpass filter prepared by reactive ion-assisted sputtering[J]. Applied Optics, 2001, 40(10): 1593-1598.

    [12] TAKASHASHI H. Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition[J]. Applied Optics, 1995, 34(4): 667-675.

    [13] KIM S H, HWANGBO C K. Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change[J]. Optics Express, 2004, 12(23): 5634-5639.

    [14] WANG J, MAIER R L. Correlation between mechanical stress and optical properties of SiO2/Ta2O5 multilayer UV narrow bandpass filters deposited by plasma ion-assisted deposition[C]. SPIE. 2005, 5870: 58700E.

    [15] WANG J, MAIER R L, SCHREIBER H. Wavefront control of SiO2-based ultraviolet narrow-bandpass filters prepared by plasma ion-assisted deposition[J]. Applied Optics, 2007, 46(2): 175-179.

    [16] JI Yi-qin, JIANG Yu-gang, LIU Hua-song, et al. Analysis on effects of thermal treatment on structure characteristic of ion beam sputtering SiO2 films[J]. Infrared and Laser Engineering. 2013, 42(2): 418-422.

    [17] TANG Jin-fa. Modern optical thin film technology[M]. Zhejiang University Press, 2006.

    [18] LIU Hua-song, WANG Li-shuan, JIANG Yu-gang, et al. Adjustments of refractive index and stress of SiO2 films prepared by IBS technology[J]. Optics and Precision Engineering, 2013, 21(9): 2238-2243.

    [19] LIU Hua-song, JI Yi-qin. Study on internal short-range order microstructure characteristic of SiO2 thin film[J]. Acta Physica Sinica. 2013, 62(18): 187801.

    [20] JOHNSON L F, MORAN M B. Compressive coatings for strengthened sapphire[C]. SPIE, 1999, 3705: 130-141.

    [21] FENG li-ping, LIU Zheng-tang, LIU Wen-ting, et al. Investigation on SiO2 thin films prepared on sapphire[J]. Materials Science and Technology, 2005, 13(2): 131-134.

    [22] FENG Li-ping, LIU Zheng-tang, SUN Jin-chi, et al. Preparation of silica thin film on sapphire and its optical properties[J]. Journal of the Chinese Society, 2004, 32(8): 1012-1015.

    [23] WANG Ying-jian, WANG Jing, SONG Yong-xiang, et al. Study of anti-reflective films coated on sapphire window[J]. Chinese Journal of Lasers, 2001, 28(8): 765-768.

    [24] LI Yun-gang. Optimum preparation and evaluation of SiO2/Y2O3 antireflective film for infrared window application[D]. Harbin Institute of Technology, 2010.

    [25] WU Zhi-xiong. Investgation on design and preparation of Y2O3/SiO2 antireflective film deposited on sapphire for infrared window application[D]. Harbin Institute of Technology, 2009.

    [26] JIA Xian. The modern analysis method for material surface[M]. Beijing: Chemical Industry Press, 2010

    [27] STONEY G G. The tension of metallic films deposited by electrolysis[J]. Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1909, 82(553): 172-175.

    [28] TANAHASHI I, YOSHIDA M, MANABE Y, et al. Effects of heat treatment on Ag particle growth and optical properties in Ag/SiO2 glass composite thin films[J]. Journal of Materials Research, 1995, 10(02): 362-365.

    [29] JIANG Xi-shun. Effect of annealing temperature on microstructure and optical properties of SiO2films[J]. Journal of Chuzhou University, 2013, 15(2): 55-58.

    [30] LI Peng, LUO Yong-shi, FAN Di, et al. Feedback loop realized with Asgmmetric Porphyrin covalently connected to mesoporous silica films[J]. Chinese Journal of Luminescence, 2015, 36(2): 206-212.

    [31] YOLDAS B E. Investigations of porous oxides as an antireflective coating for glass surfaces[J]. Applied Optics, 1980, 19(9): 1425-1429.

    SHANG Peng, JI Yi-qin, ZHAO Dao-ling, XIONG Sheng-ming, LIU Hua-song, LI Ling-hui, TIAN Dong. Thermal Stability of Mid-infrared SiO2 Thin Films Deposited by Dual Ion Beam Sputtering Method[J]. Acta Photonica Sinica, 2017, 46(8): 816003
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