[1] SU Dongqi. Research on absolute testing of the optical surface figure[D].Beijing: University of Chinese Academy of Sciences. 2013: 1517
[2] TIAN Ailing, ZHENG Xianfeng, LIU Bingcai,et al. Absolute measurement od 3D surface[J]. Journal of Xi′an Technological University, 2012, 32(6): 431436.
[3] XIE Sulong. Research on fitting precision and sampling number of Zernike polynomial fitting surface[J]. Applied Optics, 2010, 31(6): 943949.
[4] ZHANG Wei, LIU Jianfeng, LONG Funian,et al. Study on wavefront fitting using Zernike polynomials[J]. Optical Technique, 2005, 31(5): 675678.
[5] FENG Jie. BAI Yu. XING Tingwen. Fitting accuracy of wavefront using Zernike polynomials[J].ElectorOptic Technology Application, 2011, 26(2): 3134.
[6] YANG Lijuan. Study on the compensation technology of lens deformation caused by gravity[D]. Beijing: University of Chinese Academy of Sciences. 2014
[7] DING Lin, WANG Tao, YANG Hongbo,et al. Investigation and design for structure of highprecision reference mirror[J]. Infrared and Laser Engineering, 2014, 43(4): 11721175.
[8] FANG Bing, TIAN Wei, WANG Rudong,et al. Key technique in supporting of Φ300 mm aperture reference flat mirror[J]. Laser & Optoelectronics Progress, 2015, 52(9): 273279.
[9] GRIESMANN U, WANG Quandou, SOONS J. Threeflat tests including mountinginduced deformations[J]. Optical Engineering, 2007, 46(9): 093601.
[10] KONDO Y, BITOU Y. Evaluation of the deformation value of an optical flat under gravity[J]. Measurement Science & Technology, 2014, 25 (6) : 064007.
[12] ZHENG Xianfeng. Research on the key technologies of large plane measurement based on the phaseshifting interferometry[D]. Xi′an: Xi′an Technological University,2012: 1323.
[13] SHUN Weihong. Absolute testing of spherical surface with shiftrotation method[D]. Beijing: Chinese Academy of Sciences. 2014: 2053.
[14] LIU Huanhuan. Absolute testing of optical plane with N bit rotation measurement[D]. Nanjing: Nanjing University of Science and Technology, 2016.
[15] ZHAO Lei, PENG Haifeng, YU Xinfeng,et al. Lens support structure of multi point equal supporting with wholly radical freedom[J]. OptoElectronic Engineering, 2015, 42(10): 4348.
[16] WU Xuhua. Study on key techniques ofφ300 mm phaseshifting interferometer [D]. Nanjing: Nanjing University of Science and Technology, 2007: 6775.
[17] LIU Zhaodong. The research of calibration and testing techniques of φ600mm nearinfrared phaseshifting Fizeau interferometer[D]. Nanjing: Nanjing University of Science &Technology, 2011.