• High Power Laser and Particle Beams
  • Vol. 34, Issue 12, 124003 (2022)
Xiao Li1, Xiaoye He1、*, Wei Wang1、*, Zhubing Cheng1, Ting Gao1、2, and Tao Luo1
Author Affiliations
  • 1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China
  • 2Changcheng Institute of Metrology & Measurement of AVIC, Beijing 100095, China
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    DOI: 10.11884/HPLPB202234.220195 Cite this Article
    Xiao Li, Xiaoye He, Wei Wang, Zhubing Cheng, Ting Gao, Tao Luo. Research on measurement method of altitude difference using hydrostatic leveling system[J]. High Power Laser and Particle Beams, 2022, 34(12): 124003 Copy Citation Text show less
    Measurement principle of capacitive HLS sensor
    Fig. 1. Measurement principle of capacitive HLS sensor
    The zero-difference comparison platform
    Fig. 2. The zero-difference comparison platform
    Schematic diagram of zero-difference comparison
    Fig. 3. Schematic diagram of zero-difference comparison
    Repeatability of the reference sensor
    Fig. 4. Repeatability of the reference sensor
    Principle of operation of a Nivel sensor
    Fig. 5. Principle of operation of a Nivel sensor
    Construction of the HLS coordinate system
    Fig. 6. Construction of the HLS coordinate system
    Absolute altitude difference measurement results between sensor coordinate systems
    Fig. 7. Absolute altitude difference measurement results between sensor coordinate systems
    Calibration of the value of H
    Fig. 8. Calibration of the value of H
    Height difference measurement results between target centers
    Fig. 9. Height difference measurement results between target centers
    Measurement errors of height difference between target centers
    Fig. 10. Measurement errors of height difference between target centers
    sensor numberssensor readings/μm
    first readingsecond readingthird readingaverage
    337527.27527.17525.37526.5
    367527.07526.07525.77526.2
    327536.57536.07536.97536.5
    387532.87533.07533.17533.0
    447528.47528.27529.37528.6
    Table 1. Values of the HLS sensors reading
    sensor numberstilt/mradcorrection/μmd/μm
    330.0007526.5−26.5
    360.0007526.2−26.2
    320.0017536.2−36.2
    380.0047531.7−31.7
    440.0017528.3−28.3
    Table 2. Values of the tilt and d
    numbersH/μm
    32109668.96
    33109615.64
    38109401.21
    41109414.31
    44109439.87
    Table 3. Calibration value of H
    sensor numbersvalues/μm
    target center-plane HD
    3294064.349005.33
    3394012.289012.24
    3893795.389013.84
    4193832.269011.95
    4493834.949019.77
    Table 4. Measurement values of CMM and HLS sensors
    Xiao Li, Xiaoye He, Wei Wang, Zhubing Cheng, Ting Gao, Tao Luo. Research on measurement method of altitude difference using hydrostatic leveling system[J]. High Power Laser and Particle Beams, 2022, 34(12): 124003
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