• Chinese Optics Letters
  • Vol. 8, Issue s1, 62 (2010)
H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau
Author Affiliations
  • Laser Zentrum Hannover, Hollerithallee 8, 30419 Hannover, Germany
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    DOI: 10.3788/COL201008s1.0062 Cite this Article Set citation alerts
    H. Ehlers, S. Schlichting, C. Schmitz, D. Ristau. Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques[J]. Chinese Optics Letters, 2010, 8(s1): 62 Copy Citation Text show less

    Abstract

    The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtual deposition system is applied for a pre-selection of coating designs that result in increased process stability using optical broadband monitoring strategies. Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies on virtual and real deposition processes.
    H. Ehlers, S. Schlichting, C. Schmitz, D. Ristau. Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques[J]. Chinese Optics Letters, 2010, 8(s1): 62
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