Di HU, Qingming XIAO, Jie ZHENG. Research on Technology of Optical Switch Devices with Integrated Tunable Filters[J]. Study On Optical Communications, 2024, 50(6): 23008501
- Study On Optical Communications
- Vol. 50, Issue 6, 23008501 (2024)
![Electrostatically driven twisted microscope with a vertical comb structure[2]](/richHtml/gtxyj/2024/50/6/23008501/img_01.jpg)
Fig. 1. Electrostatically driven twisted microscope with a vertical comb structure[2]
Fig. 2. Principle of MEMS-based 1×N OSW
Fig. 3. A MEMS-based TOF with MEMS micro mirror
Fig. 4. A biaxial MEMS micro mirror[6]
Fig. 5. Optical structure and fiber array structure of MEMS TOF-OSW
Fig. 6. The principle of transmission grating spectrometer
Fig. 7. Structure of biaxial MEMS micro mirror
Fig. 8. Working principle of MEMS micro mirror in X-axis and Y-axis
Fig. 9. Simulation and specific dimensions of MEMS TOF-OSW
Fig. 10. Simulation parameters of MEMS TOF-OSW
Fig. 11. Simulation results of fiber coupling efficiency and output beam position of MEMS TOF-OSW
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Table 1. MEMS micro mirror X and Y axis angles for different OSW channels and TOF wavelengths
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