The spectral line widths of theory and experiment are analyzed with different temperatures; the line strengths under room temperature in HITRAN database are corrected to measured temperature, and then synthetic spectra are calculated. With the nonlinear least squares fit between measured spectra and calibration spectra, standard gas concentrations of CO at different temperatures are obtained. The inversion concentration error of this algorithm at room temperature is less than 5% with high precision. But with the temperature increasing, the concentration error will increase gradually. At the same time, there is the same apparent structure to component CO in the residual spectrum. Also, with higher temperature, the structure is more obvious and can not be removed by increasing the number of fitting. Comparing experimental results and theoretical analysis, the temperature correction methods of calibration spectra, which are not suitable for high temperature gas, are the main reason for inversion error at higher temperature. These results have important significance for further research on accurately correcting parameters and how to inverse the high temperature gas concentrations more accurately.