[1] HUANG Q, WU K, WANG C, et al.. Development of an abbe error free micro coordinate measuring machine ［J］. Applied Sciences, 2016, 6(4): 97.

[2] CHEN H, CHEN X H, WANG SH, et al.. The parameters design and analysis of micro-nano CMM Probe ［J］. Acta Metrologica Sinica, 2013, 34(5): 401-405. (in Chinese)

[3] CHEN X H, CHEN H, WANG SH, et al.. Design of elastic structure parameters of probe in micro-nano CMM ［J］. Opt. Precision Eng., 2013, 21(10): 2587-2593. (in Chinese)

[4] WECKENMANN A, PEGGS G, HOFFMANN J. Probing systems for dimensional micro-and nano-metrology ［J］. Measurement Science & Technology, 2006, 17(3): 504-509.

[5] KHALID A, PETER K, SIMON L.et al.. Performance assement of a new variable stiffness probing system for micro-CMMs ［J］. Sensors, 2016, 16(4): 492.

[6] HE M, LIU R, LI Y, et al.. Tactile probing system based on micro-fabricated capacitive sensor ［J］. Sensors & Actuators A Physical, 2013, 194: 128-134.

[7] BONELLO P, BRENNAN M J, ELLIOTT S J, et al.. Designs for an adaptive tuned vibration absorber with variable shape stiffness element ［J］. Proceedings Mathematical Physical & Engineering Sciences, 2005, 461(2064): 3955-3976.

[8] CHALLA V R, PRASAD M, SHI Y, et al.. A vibration energy harvesting device with bidirectional resonance frequency tunability ［J］. Smart Materials & Structures, 2008, 17(1): 15010-15035.

[9] FAN K C, CHENG F, PAN W T, et al.. Analysis of the contact probe mechanism for micro-coordinate measuring machines ［J］. Optoelectronics Instrumentation & Data Processing, 2010, 46(4): 340-346.

[10] ALBLALAIHID K, KINNELL P, LAWES S. Fabrication and characterisation of a novel smart suspension for micro-CMM probes ［J］. Sensors & Actuators A Physical, 2015, 232: 368-375.

[11] HU J F, CHEN X X. Optimized design of a micro-motion stage with zero stiffness ［J］. Opt. Precision Eng., 2018, 26(6): 1430-1440. (in Chinese)

[12] HOWELL L L, MAGLEBY S P, OLSEN B M.Handbook of Compliant Mechanisms ［M］. New York: John Wiley & Sons, 2013.

[13] HU J F, XU G Y, HAO Y ZH. Multi-objectiveoptimization of micro-manipulation stage based on response surface method ［J］. Opt. Precision Eng., 2015, 23(4): 1096-1104. (in Chinese)

[14] SUN Y Q.Active Disturbance Rejection Control for Piezo-driven Nanopositioning Stage ［D］. Jinan: Shandong University, 2016. (in Chinese)

[15] LU Q, HUANG W Q, SUN M X. Optimizationdesign of amplification machanism for level flexure hinge based on compliance ratio ［J］.Opt. Precision Eng., 2016, 24(1): 102-111. (in Chinese)

[16] ALBLALAIHID K, LAWES S, KINNELL P. Variable stiffness probing systems for micro-coordinate measuring machines ［J］. Precision Engineering, 2016, 43: 262-269.

[17] YU H J.Research on the Trigger Mechanism of a 3D Resonant Nano Probe ［D］. Hefei: Hefei University of Technology, 2015. (in Chinese)

[18] PRIL W. Development of high precision mechanical probes for coordinate measuring machines ［J］. Technische Universiteitndhoven, 2002, 25: 100-102.