Parallel laser writing system with scanning Dammann lithography

Feng Zhu; Jianyong Ma; Wei Huang; Jin Wang; Changhe Zhou

doi:10.3788/col201412.080501

Journals >Chinese Optics Letters >Volume 12 >Issue 8 >Page 080501 > Article

Chinese Optics Letters
Vol. 12, Issue 8, 080501 (2014)

Parallel laser writing system with scanning Dammann lithography

Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, and Changhe Zhou

DOI: 10.3788/col201412.080501 Cite this Article Set citation alerts

Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, Changhe Zhou. Parallel laser writing system with scanning Dammann lithography[J]. Chinese Optics Letters, 2014, 12(8): 080501 Copy Citation Text

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Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, Changhe Zhou. Parallel laser writing system with scanning Dammann lithography[J]. Chinese Optics Letters, 2014, 12(8): 080501

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