• Chinese Optics Letters
  • Vol. 1, Issue 4, 04217 (2003)
Qingfeng Yan1、*, Jinzhong Yu1, Jinsong Xia1, and Zhongli Liu2
Author Affiliations
  • 1State Key Laboratory on Integrated optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
  • 2Microelectronics R&
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    Qingfeng Yan, Jinzhong Yu, Jinsong Xia, Zhongli Liu. High-speed electrooptical VOA integrated in silicon-on-insulator[J]. Chinese Optics Letters, 2003, 1(4): 04217 Copy Citation Text show less

    Abstract

    In this paper, we present simulation results of an electrooptical variable optical attenuator (VOA) integrated in silicon-on-insulator waveguide. The device is functionally based on free carriers absorption to achieve attenuation. Beam propagation method (BPM) and two-dimensional semiconductor device simulation tool PISCES-II were used to analyze the dc and transient characteristics of the device. The device has a response time (including rise time and fall time) less than 200 ns, much faster than the thermooptic and micro-electromechanical systems (MEMSs) based VOAs.
    Qingfeng Yan, Jinzhong Yu, Jinsong Xia, Zhongli Liu. High-speed electrooptical VOA integrated in silicon-on-insulator[J]. Chinese Optics Letters, 2003, 1(4): 04217
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