Theoretical Model of Funnel Microchannel Plate Fabricated through Dry Etching

Xiangbiao QIU; Xinjie MIN; Ge JIN; Jiangning SUN; Jian WANG; Xiaoqing CONG; Zhengjun ZHANG; Zhao XU; Kai PAN; Ling REN; Zhen ZHANG; Fangjian QIAO; Huijun NIE; Guorui HUANG; Xiaoqian CHEN; Zexun HU; Yanjian LIN; Dan LIU; Xiaoming YANG

Journals >Infrared Technology >Volume 44 >Issue 8 >Page 818 > Article

Infrared Technology
Vol. 44, Issue 8, 818 (2022)

Theoretical Model of Funnel Microchannel Plate Fabricated through Dry Etching

Xiangbiao QIU^*, Xinjie MIN, Ge JIN, Jiangning SUN, Jian WANG, Xiaoqing CONG, Zhengjun ZHANG, Zhao XU, Kai PAN, Ling REN, Zhen ZHANG, Fangjian QIAO, Huijun NIE, Guorui HUANG, Xiaoqian CHEN, Zexun HU, Yanjian LIN, Dan LIU, and Xiaoming YANG

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[in Chinese]

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DOI: Cite this Article

QIU Xiangbiao, MIN Xinjie, JIN Ge, SUN Jiangning, WANG Jian, CONG Xiaoqing, ZHANG Zhengjun, XU Zhao, PAN Kai, REN Ling, ZHANG Zhen, QIAO Fangjian, NIE Huijun, HUANG Guorui, CHEN Xiaoqian, HU Zexun, LIN Yanjian, LIU Dan, YANG Xiaoming. Theoretical Model of Funnel Microchannel Plate Fabricated through Dry Etching[J]. Infrared Technology, 2022, 44(8): 818 Copy Citation Text

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References

[10] Fehre K, Trojanowskaja D, Gatzke J, et al. Absolute ion detection efficiencies of microchannel plates and funnel microchannel plates for multi-coincidence detection[J]. Review of Scientific Instruments, 2018, 89(4): 045112.

[11] Matoba S, Takahashi R, Io C, et al. Absolute detection efficiency of a high-sensitivity microchannel plate with tapered pores[J]. Japanese Journal of Applied Physics, 2011, 50(11R): 112201.

[15] CHEN P, TIAN J, YUAN X, et al. A novel bowl-shaped microchannel plate with high electron collection efficiency and good time performance[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2019, 936: 534-536.

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