• Acta Photonica Sinica
  • Vol. 38, Issue 8, 1962 (2009)
YANG Yong-bin1、2、*, XU Wen-dong1, and LUO Ji-quan3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: Cite this Article
    YANG Yong-bin, XU Wen-dong, LUO Ji-quan. Design of Automatism Etching for Fabricating Fiber Probes of Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2009, 38(8): 1962 Copy Citation Text show less

    Abstract

    A design of automatism etching for fabricating the fiber probe of scanning near-field optical microscope is proposed.Probes of various structures,such as sharp tip and large cone angle or multi-taper,can be formed by using the special structure formed in the static etching process and the change of the contact position of meniscus on the fiber surface caused by the fiber′s movement in the dynamic etching process,and controlling the time of etching.The automatism of fabricating the probe is realized by controlling the whole equipment with the computer in this design,so that the experimental conditions of forming fiber probe are the same.The experimental results show that fiber probes with 70° cone angle can be fabricated,which is under 100nm.And,the fiber probes with high repeatability and different configuration can be obtained by using this design,so that different requirements can be satisfied.In addition,the configuration of the design is very simple and can be actualized easily.
    YANG Yong-bin, XU Wen-dong, LUO Ji-quan. Design of Automatism Etching for Fabricating Fiber Probes of Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2009, 38(8): 1962
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