Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Ming Zhang; Chang Ni; Yu Zhu; Leijie Wang; Chuxiong Hu; Jinchun Hu

doi:10.3788/COL201715.101201

Journals >Chinese Optics Letters >Volume 15 >Issue 10 >Page 101201 > Article

Chinese Optics Letters
Vol. 15, Issue 10, 101201 (2017)

Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Ming Zhang^1、2、*, Chang Ni^1、2, Yu Zhu^1、2, Leijie Wang^1、2, Chuxiong Hu^1、2, and Jinchun Hu^1、2

Author Affiliations

¹State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

²Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing 100084, China

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DOI: 10.3788/COL201715.101201 Cite this Article Set citation alerts

Ming Zhang, Chang Ni, Yu Zhu, Leijie Wang, Chuxiong Hu, Jinchun Hu. Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer[J]. Chinese Optics Letters, 2017, 15(10): 101201 Copy Citation Text

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