Guangyu ZHAO, Li XU, Jie FAN, Jiabin ZHANG, Yunping LAN, Yonggang ZOU, Xiaohui MA. Influence of Substrate Temperature on Properties of ZnSe Thin Films Deposited by Electron-beam Evaporation[J]. Acta Photonica Sinica, 2021, 50(6): 209
- Acta Photonica Sinica
- Vol. 50, Issue 6, 209 (2021)
Fig. 1. XRD patterns for ZnSe thin films at different substrate temperatures
Fig. 2. The variation of grain size strain and dislocation density of ZnSe thin films with substrate temperature
Fig. 3. Transmission spectrum of ZnSe thin films at different substrate temperatures
Fig. 4. Refractive index dispersion curve of ZnSe thin films at different substrate temperatures
Fig. 5. Dispersion curve of extinction coefficient of ZnSe thin films at different substrate temperatures
Fig. 6. The actual thickness of ZnSe thin films at different substrate temperatures
Fig. 7. The absorption specturm and the relationship between hv and （αhv ）2 of ZnSe thin films at different substrate temperatures
Fig. 8. AFM images of ZnSe thin films at different substrate temperatures
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Table 1. Deposition parameters of ZnSe thin film
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Table 2. The microstructure parameters of ZnSe thin films at different substrate temperatures
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