• Chinese Journal of Lasers
  • Vol. 47, Issue 5, 0502009 (2020)
Haofeng Yu, Jian Xu*, Aodong Zhang, and Ya Cheng
Author Affiliations
  • State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China
  • show less
    DOI: 10.3788/CJL202047.0502009 Cite this Article Set citation alerts
    Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009 Copy Citation Text show less
    References

    [1] El-Sayed M A. Some interesting properties of metals confined in time and nanometer space of different shapes[J]. Accounts of Chemical Research, 34, 257-264(2001).

    [2] Barnes W L, Dereux A, Ebbesen T W. Surface plasmon subwavelength optics[J]. Nature, 424, 824-830(2003).

    [3] Henzie J, Lee M H, Odom T W. Multiscale patterning of plasmonic metamaterials[J]. Nature Nanotechnology, 2, 549-554(2007).

    [4] Hossain M M, Gu M. Fabrication methods of 3D periodic metallic nano/microstructures for photonics applications[J]. Laser & Photonics Reviews, 8, 233-249(2014).

    [5] Zarzar L D, Swartzentruber B S, Harper J C et al. Multiphoton lithography of nanocrystalline platinum and palladium for site-specific catalysis in 3D microenvironments[J]. Journal of the American Chemical Society, 134, 4007-4010(2012).

    [6] Geissler M, Xia Y. Patterning:principles and some new developments[J]. Advanced Materials, 16, 1249-1269(2004).

    [7] Stellacci F, Bauer C A, Meyer-Friedrichsen T et al. Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning[J]. Advanced Materials, 14, 194-198(2002).

    [8] Shukla S, Furlani E P, Vidal X et al. Two-photon lithography of sub-wavelength metallic structures in a polymer matrix[J]. Advanced Materials, 22, 3695-3699(2010).

    [9] Hirt L, Reiser A, Spolenak R et al. Additive manufacturing of metal structures at the micrometer scale[J]. Advanced Materials, 29, 1604211(2017).

    [10] Moran C E, Radloff C, Halas N J. Benchtop fabrication of submicrometer metal line and island arrays using passivative microcontact printing and electroless plating[J]. Advanced Materials, 15, 804-807(2003).

    [11] Tanaka T, Ishikawa A, Kawata S. Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure[J]. Applied Physics Letters, 88, 081107(2006).

    [12] Cao Y Y, Takeyasu N, Tanaka T et al. 3D metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction[J]. Small, 5, 1144-1148(2009).

    [13] Maruo S, Saeki T. Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix[J]. Optics Express, 16, 1174-1179(2008).

    [14] Xu B B, Xia H, Niu L G et al. Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating[J]. Small, 6, 1762-1766(2010).

    [15] Son Y, Yeo J, Moon H et al. Nanoscale electronics: digital fabrication by direct femtosecond laser processing of metal nanoparticles[J]. Advanced Materials, 23, 3176-3181(2011).

    [16] Chen Z Y, Fang G, Cao L C et al. Direct writing of silver micro-nanostructures by femtosecond laser tweezer[J]. Chinese Journal of Lasers, 45, 0402006(2018).

    [17] Liao J N, Wang X D, Zhou X W et al. Femtosecond laser direct writing of copper microelectrodes[J]. Chinese Journal of Lasers, 46, 1002013(2019).

    [18] Xu J, Liao Y, Zeng H D et al. Selective metallization on insulator surfaces with femtosecond laser pulses[J]. Optics Express, 15, 12743-12748(2007).

    [19] Liao Y, Xu J, Sun H Y et al. Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser[J]. Applied Surface Science, 254, 7018-7021(2008).

    [20] Song J X, Liao Y, Liu C et al. Fabrication of gold microelectrodes on a glass substrate by femtosecond-laser-assisted electroless plating[J]. Journal of Laser Micro/Nanoengineering, 7, 334-338(2012).

    [21] Berg Y, Winter S, Kotler Z. Embedded metal microstructures in glass substrates by a combined laser trenching and printing process[J]. Journal of Laser Micro/Nanoengineering, 13, 131-134(2018).

    [22] Hanada Y, Sugioka K, Midorikawa K. Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application[J]. Applied Physics A, 90, 603-607(2008).

    [23] Goluch E D, Shaikh K A, Ryu K et al. Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces[J]. Applied Physics Letters, 85, 3629-3631(2004).

    [24] Xu J, Li X L, Zhong Y et al. Glass-channel molding assisted 3D printing of metallic microstructures enabled by femtosecond laser internal processing and microfluidic electroless plating[J]. Advanced Materials Technologies, 3, 1800372(2018).

    [25] Lenzner M, Krüger J, Sartania S et al. Femtosecond optical breakdown in dielectrics[J]. Physical Review Letters, 80, 4076-4079(1998).

    [26] Joglekar A P, Liu H, Meyhofer E et al. Optics at critical intensity: applications to nanomorphing[J]. Proceedings of the National Academy of Sciences of the United States of America, 101, 5856-5861(2004).

    [27] Sugioka K, Cheng Y. Ultrafast lasers: reliable tools for advanced materials processing[J]. Light: Science & Applications, 3, e149(2014).

    Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009
    Download Citation