Developments of Deep Ultraviolet(DUV) coating technologies in Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences(CIOMP) were reviewed. Some researches were carried out systematically to meet the requirements of high quality DUV optical systems for coating processes. Two special systems were customized for evaporation and ion beam sputter deposition techniques respectively, which could coat the substrates for φ410 mm optical elements. After optimizing deposition technology, the typical transmission for a both-side coating sample at 193 nm is in the range of 98.5%~99%. The factors that effect on the figure accuracy of optical elements were investigated, the obtained thickness uniformity of coatings is 0.1% rms and it meets the required tolerances of high quality DUV optical system. Coating stresses were measured by using X-ray diffraction technique and their effects on the figure error were analyzed by using finite element simulation. In consideration of the practical utilities of coatings, several kind of solving methods were proposed such as the recovery of the transmission degradation caused by environmental pollution with UV radiation and the accurate control of coating thicknesses based on crystal monitor technique. Finally, it points out the research directions in further based on the results mentioned above.