Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process

Cheng-cheng ZHAO; Shu-zhen CHEN; Zheng LEI; Xiao-lan MENG

doi:10.3969/j.issn.1672-8785.2023.05.001

Journals >INFRARED >Volume 44 >Issue 5 >Page 1 > Article

INFRARED
Vol. 44, Issue 5, 1 (2023)

Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process

Cheng-cheng ZHAO, Shu-zhen CHEN, Zheng LEI, and Xiao-lan MENG

Author Affiliations

[in Chinese]

show less

DOI: 10.3969/j.issn.1672-8785.2023.05.001 Cite this Article

ZHAO Cheng-cheng, CHEN Shu-zhen, LEI Zheng, MENG Xiao-lan. Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process[J]. INFRARED, 2023, 44(5): 1 Copy Citation Text

show less

References

[4] Nikon Corporation. Nikon Step and Repeat System Operation Guide \[EB/OL\]. http://cdn-10.nikon-cdn.com/pdf/NC3_man.pdf, 1998.

ZHAO Cheng-cheng, CHEN Shu-zhen, LEI Zheng, MENG Xiao-lan. Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process[J]. INFRARED, 2023, 44(5): 1

Download Citation

Tools

Save the article for my favorites

Paper Information