Jie Cheng, Xiangning Wang, Yongliang Xiao, Gengsheng Yu. Simulation of Scattering Characteristics of Micro- and Nano-Scale Defects in Sapphire Wafer[J]. Chinese Journal of Lasers, 2019, 46(4): 0404001
- Chinese Journal of Lasers
- Vol. 46, Issue 4, 0404001 (2019)
Fig. 1. Coordinate system of spherical particle scattering
Fig. 2. Simulation model of laser detection system for microsphere defect
Fig. 3. Scattering light intensity distributions of SiO2 microsphere defect with different sizes at different receiving positions
Fig. 4. Spatial scattering light intensity distributions of Al microsphere defect with different sizes. (a) q=75;(b) q=50;(c) q=25;(d) q=10
Fig. 5. Spatial scattering light intensity distributions of SiO2 microsphere defect at different incident wavelengths
Fig. 6. Spatial scattering light intensity distributions of SiO2 microsphere defect with different sizes when λ is 350 nm. (a) q=20, R=1.11 mm;(b) q=10, R=0.56 mm
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Table 1. Ripple number of scattering light for defects with different sizes at different scattering angles θ
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Table 2. Ripple number of scattered light for defects with different sizes when θ is 45°
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