Structural, optical and electrical properties of ZnO: B thin films with different thickness for bifacial a-Si:H/c-Si heterojunction solar cells

Dong XU; Sheng YIN; Xiangbin ZENG; Song YANG; Xixing WEN

doi:10.1007/s12200-016-0595-2

[1] Wenas W W, Yamada A, Takahashi K, Yoshino M, Konagai M Electrical and optical properties of boron-doped ZnO thin films for solar cells grown by metalorganic chemical vapor deposition. Journal of Applied Physics, 1991, 70(11): 7119–7123.

[2] Choi I. Properties of boron-doped ZnO thin films grown by using MOCVD. Journal of the Korean Physical Society, 2013, 63(10): 1997–2001.

[3] Gao L, Zhang Y, Zhang J, Xu K. Boron doped ZnO thin films fabricated by RF-magnetron sputtering. Applied Surface Science, 2011, 257(7): 2498–2502.

[4] Jana S, Vuk A S, Mallick A, Orel B, Biswas P K. Effect of boron doping on optical properties of sol-gel based nanostructured zinc oxide films on glass. Materials Research Bulletin, 2011, 46(12): 2392–2397.

[5] Pawar B N, Jadkar S R, Takwale M G. Deposition and characterization of transparent and conductive sprayed ZnO:B thin films. Journal of Physics and Chemistry of Solids, 2005, 66(10): 1779–1782.

[6] Yamamoto Y, Saito K, Takahashi K, Konagai M. Preparation of boron-doped ZnO thin films by photo-atomic layer deposition. Solar Energy Materials and Solar Cells, 2001, 65(1-4): 125–132.

[7] Müller J, Rech B, Springer J, Vanecek M. TCO and light trapping in silicon thin film solar cells. Solar Energy, 2004, 77(6): 917–930.

[8] Yin J, Zhu H, Wang Y, Wang Z, Gao J, Mai Y, Ma Y, Wan M, Huang Y. A study of ZnO:B films for thin film silicon solar cells. Applied Surface Science, 2012, 259:758–763.

[9] Zeng X, Wen X, Sun X, Liao W, Wen Y. Boron-doped zinc oxide thin films grown by metal organic chemical vapor deposition for bifacial a-Si:H/c-Si heterojunction solar cells. Thin Solid Films, 2016, 605(30): 257–262.

[10] Addonizio M L, Diletto C. Doping influence on intrinsic stress and carrier mobility of LP-MOCVD-deposited ZnO:B thin films. Solar Energy Materials and Solar Cells, 2008, 92(11): 1488–1494.

[11] Dong B, Fang G, Wang J, Guan W, Zhao X. Effect of thickness on structural, electrical, and optical properties of ZnO: Al films deposited by pulsed laser deposition. Journal of Applied Physics, 2007, 101(3): 033713-1–033713-7.

[12] Exarhos G J, Zhou X D. Discovery-based design of transparent conducting oxide films. Thin Solid Films, 2007, 515(18): 7025– 7052.

[13] Fa S. Science of Microtechnique, Institute of Procuction and Robotic, écolePolytechniqueFédérale de Lausanne, Lausanne, 2003.

[14] Kumar V, Singh R G, Purohit L P, Mehra R M. Structural, transport and optical properties of boron-doped zinc oxide nanocrystalline. Journal of Materials Science and Technology, 2011, 27(6): 481–488.

[15] Huang Q, Wang Y, Wang S, Zhang D, Zhao Y, Zhang X. Transparent conductive ZnO:B films deposited by magnetron sputtering. Thin Solid Films, 2012, 520(18): 5960–5964.

[16] Ton-That C, Foley M, Phillips MR, Tsuzuki T, Smith Z. Correlation between the structural and optical properties of Mn-doped ZnO nanoparticles. Journal of Alloys and Compounds, 2012, 522: 114– 117