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    Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 284 > Article
    • Optics and Precision Engineering
    • Vol. 12, Issue z1, 284 (2004)
    Micromachined resonant bulk-silicon accelerometer
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    [in Chinese], [in Chinese]. Micromachined resonant bulk-silicon accelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 284 Copy Citation Text show less

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    [in Chinese], [in Chinese]. Micromachined resonant bulk-silicon accelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 284
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