Tiantian LI, Yaoning SUN, Li ZHANG, Guojian WANG, Tiandai JIA, Aixin FENG. Laser Fabrication and Performance of Periodic Microstructure on Polycrystalline Silicon Surface[J]. Acta Photonica Sinica, 2021, 50(4): 102
- Acta Photonica Sinica
- Vol. 50, Issue 4, 102 (2021)
Fig. 1. Schematic of experiment equipment and laser-textured polysilicon sample
Fig. 2. Micro-morphologies and corresponding curves of cross section of laser-textured polysilicon sample under different frequency
Fig. 3. Average depth of polysilicon samples at different frequency
Fig. 4. Reflectivity of untextured and textured polysilicon samples with different technique
Fig. 5. Average reflectivity of laser-textured, chemical etching and untextured polysilicon samples
Fig. 6. 3D topography of laser textured and chemical etching
Fig. 7. Structure diagram of photovoltatic effect
Fig. 8. I ⁃U curves of untexture and laser textured polysilicon samples
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Table 1. Simulation parameters
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Table 2. Standard test conditions parameter of incident light
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Table 3. Simulation results
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