• Chinese Journal of Lasers
  • Vol. 46, Issue 2, 0203001 (2019)
Yun Cui*, Hanyu Zhang, Yuan'an Zhao, Yunxia Jin, Meiping Zhu, and Jianda Shao
Author Affiliations
  • Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/CJL201946.0203001 Cite this Article Set citation alerts
    Yun Cui, Hanyu Zhang, Yuan'an Zhao, Yunxia Jin, Meiping Zhu, Jianda Shao. Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser[J]. Chinese Journal of Lasers, 2019, 46(2): 0203001 Copy Citation Text show less
    Schematic of experimental setup for laser damage test
    Fig. 1. Schematic of experimental setup for laser damage test
    Schematic of micro beam emission positioning device
    Fig. 2. Schematic of micro beam emission positioning device
    Damage topography of mark point. (a) Top-view of mark point; (b) partial enlarged surface morphology of mark point; (c) cross-section view of mark point by FIB milling
    Fig. 3. Damage topography of mark point. (a) Top-view of mark point; (b) partial enlarged surface morphology of mark point; (c) cross-section view of mark point by FIB milling
    Damage topography. (a) Damage view of target point; (b) positions of six observation points along radius of damage area; (c) high resolution SEM images of six positions
    Fig. 4. Damage topography. (a) Damage view of target point; (b) positions of six observation points along radius of damage area; (c) high resolution SEM images of six positions
    Cross-section topography obtained by FIB milling. (a) Position 2; (b) position 3; (c) position 4
    Fig. 5. Cross-section topography obtained by FIB milling. (a) Position 2; (b) position 3; (c) position 4
    Surface roughness. (a) Position 4; (b) position 6
    Fig. 6. Surface roughness. (a) Position 4; (b) position 6
    Grain size. (a) Position 3; (b) position 4
    Fig. 7. Grain size. (a) Position 3; (b) position 4
    XRD diffraction spectra of three micro-regions in Au film without laser irradiation
    Fig. 8. XRD diffraction spectra of three micro-regions in Au film without laser irradiation
    XRD diffraction spectra of micro-regions without laser irradiation and with laser irradiation, the insert figure is enlarged view of (111) peak
    Fig. 9. XRD diffraction spectra of micro-regions without laser irradiation and with laser irradiation, the insert figure is enlarged view of (111) peak
    Sample typeThickness /nmTest methodLaser wavelength /nmPulse width /fsBeam size /μmLIDT /(J·cm-2)
    Au film1301-on-18003005000.61
    Table 1. LIDT of Au film under the irradiation of 800 nm femtosecond laser
    Yun Cui, Hanyu Zhang, Yuan'an Zhao, Yunxia Jin, Meiping Zhu, Jianda Shao. Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser[J]. Chinese Journal of Lasers, 2019, 46(2): 0203001
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