• Optics and Precision Engineering
  • Vol. 15, Issue 12, 1862 (2007)
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Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. Soft X-ray and extreme ultraviolet optics in CIOMP[J]. Optics and Precision Engineering, 2007, 15(12): 1862 Copy Citation Text show less
    References

    [1] CHEN B,NI Q L,CAO J L,et al..Development of soft X-ray and vacuum ultraviolet spectrum sources[J].Spectroscopy and Spectral Analysis,2005,25(3):453-455.

    [2] JIN CH SH,LIN Q,MA Y Y,et al..Study of uniform soft X-ray multilayer deposition technology[J].High Power Laser and Particle Beams,2003,15(5):444-447.

    [3] CHEN B,NI Q L,CAO J H.Soft X-ray refleetometer with laser produced plasma source[J].Spectroscopy and Spectral Analysis,2005,25(3):453-455.

    [4] CHEN B,GONG Y,NI Q L.A complex X-ray and EUV imaging telescope design[J].SPIE,2004,5171:155-158.

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