A UV-preionized KrF excimer laser with an output energy of 0.42 J

Yuan Cailai; Shangguan Cheng; Ye Chao; Dou Airong; Ling Yingyi

Journals >Chinese Journal of Lasers >Volume 8 >Issue 12 >Page 4 > Article

Chinese Journal of Lasers
Vol. 8, Issue 12, 4 (1981)

A UV-preionized KrF excimer laser with an output energy of 0.42 J

Yuan Cailai, Shangguan Cheng, Ye Chao, Dou Airong, and Ling Yingyi

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[in Chinese]

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Yuan Cailai, Shangguan Cheng, Ye Chao, Dou Airong, Ling Yingyi. A UV-preionized KrF excimer laser with an output energy of 0.42 J[J]. Chinese Journal of Lasers, 1981, 8(12): 4 Copy Citation Text

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Abstract

Experimental studies on the high power and high effeeiency UV-preionized KrF (=248 nm) excimer laser are reported. The maximum output energy per pulse is over 420 mj. Characteristics of lasing and fluorescence spectrum for KrF are studied. The effect of additive Ne gas in the mixture on lasing energy is examined.

Yuan Cailai, Shangguan Cheng, Ye Chao, Dou Airong, Ling Yingyi. A UV-preionized KrF excimer laser with an output energy of 0.42 J[J]. Chinese Journal of Lasers, 1981, 8(12): 4

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