• Optics and Precision Engineering
  • Vol. 26, Issue 3, 662 (2018)
LIU Lu1, WU Sen1, HU Xiao-dong1, PANG Hai2, and HU Xiao-tang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/ope.20182603.0662 Cite this Article
    LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662 Copy Citation Text show less

    Abstract

    To increase the imaging rate of atomic force microscope (AFM), a new AFM structure design was presented. In this structure, the Y and Z scanners were integrated in the scanning head, which move the probe in the slow-axis and the Z-axis, respectively. The X scanner was separated from the head, which moved the sample in the fast-axis. An independent one-dimensional nanopositioning stage was used as the X scanner. Due to its high stiffness, the X scanner could carry relative large samples and scan at a high speed without inducing resonance vibration. Meanwhile, the load of the Z scanner was minimized, resulting in higher resonant frequency and hence faster response. A trackable optical lever was used to avoid the shift of the laser spot on the cantilever probe during scanning. A magnetic based probe holder as well as a new adjustment setup were introduced to hold the probe and precisely position it relative to the laser. According to a preliminary test, the AFM system established in this work can realize high speed imaging for the sample with centimeters dimensions and mass above 10 g. The scanning speed (line frequency) achieves 50 Hz@13 μm with linear driving and simple PID control algorithm.
    LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662
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