• Journal of Infrared and Millimeter Waves
  • Vol. 33, Issue 6, 598 (2014)
XU Jia-Jia1、*, CHEN Jian-Xin1, ZHOU Yi1, XU Qing-Qing1, WANG Fang-Fang1, XU Zhi-Cheng1、2, BAI Zhi-Zhong1, JIN Chuan1、2, CHEN Hong-Lei1, DING Rui-Jun1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3724/sp.j.1010.2014.00598 Cite this Article
    XU Jia-Jia, CHEN Jian-Xin, ZHOU Yi, XU Qing-Qing, WANG Fang-Fang, XU Zhi-Cheng, BAI Zhi-Zhong, JIN Chuan, CHEN Hong-Lei, DING Rui-Jun, HE Li. 320×256 long wavelength infrared focal plane arrays based on type-Ⅱ InAs/GaSb superlattice[J]. Journal of Infrared and Millimeter Waves, 2014, 33(6): 598 Copy Citation Text show less

    Abstract

    The growth and fabrication of a 320×256 type-Ⅱ InAs/GaSb superlattice long wavelength infrared focal plane array detector were reported. The superlattice material was grown on GaSb substrate using molecular beam epitaxy (MBE) technology with a PBIN structure. The structure of infrared absorption layer is 14ML (InAs)/7ML(GaSb), the focal plane array had a pixel size of 27μm×27μm and a pitch of 30μm. The device fabrication process consisted of mesa dry etching, side-wall passivation, metallization and flip-chip hybridization with readout integrated circuit (ROIC). At 77K, the detector had a 100% cut-off wavelength of 10.5μm, and a peak detectivity of 8.41×109cmHz1/2W-1. Concept proof of infrared imaging was also demonstrated with the focal plane array at liquid nitrogen temperature.
    XU Jia-Jia, CHEN Jian-Xin, ZHOU Yi, XU Qing-Qing, WANG Fang-Fang, XU Zhi-Cheng, BAI Zhi-Zhong, JIN Chuan, CHEN Hong-Lei, DING Rui-Jun, HE Li. 320×256 long wavelength infrared focal plane arrays based on type-Ⅱ InAs/GaSb superlattice[J]. Journal of Infrared and Millimeter Waves, 2014, 33(6): 598
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